High Current Focused Ion Beam Instrument for Destructive Physical AnalysisApplications

机译：大电流聚焦离子束仪，用于破坏性物理分析应用

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来源
《ISTFA 2008 : Conference proceedings from the 34th international symposium for testing and failure analysis》|2008年|7-13|共7页
会议地点 Portland OR(US);Portland OR(US)
作者
Paul Tesch; rnNoel Smith; rnNoel Martin; rnDoug Kinion;
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作者单位

Oregon Physics LLC, Hillsboro, OR USArnp.tesch@oregon-physics.com;

Oregon Physics LLC, Hillsboro, OR USA;

Oregon Physics LLC, Hillsboro, OR USA;

Oregon Physics LLC, Hillsboro, OR USA;

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正文语种 eng
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High Current Focused Ion Beam Instrument for Destructive Physical AnalysisApplications

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