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首页> 外文会议>Joint 2015 e-Manufacturing amp; Design Collaboration Symposium 2015 and 2015 International Symposium on Semiconductor Manufacturing >Data fusion at the source: Standards and technologies for seamless sensor integration — Alan Weber
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Data fusion at the source: Standards and technologies for seamless sensor integration — Alan Weber

机译：源头上的数据融合：无缝传感器集成的标准和技术— Alan Weber

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摘要

Process engineers are continually looking for ways to understand equipment behavior and improve process performance as feature sizes shrink and the related process windows narrow. In additional to collecting more and more data from the equipment directly, leading-edge factories often use custom, external sensors to improve process visibility and control. Some even extract information from internal equipment log files to look deeply into the mechanisms that may affect process performance and/or equipment productivity. As these efforts yield results, the number and variety of data sources required to support new analysis algorithms and applications will continue to grow with each manufacturing process node (see Figure 1). The problem with this explosion of data sources is that most of them are connected to the factory systems with custom, in-house software solutions, and the collected data is usually stored in whatever form/location is most convenient for the initial consuming application. Only rarely will any of this data be stored in a comprehensive, engineering database suitable for general use across the factory. This results in a “trail mix” style of system architecture that becomes increasingly difficult to understand and support over time. Clearly, a better approach is required.
机译：随着功能部件尺寸的缩小和相关过程窗口的缩小，过程工程师一直在寻找方法来理解设备行为并改善过程性能。除了直接从设备中收集越来越多的数据外，尖端工厂还经常使用定制的外部传感器来提高过程的可视性和控制力。有些甚至从内部设备日志文件中提取信息，以深入研究可能影响过程性能和/或设备生产率的机制。随着这些努力产生结果，支持新的分析算法和应用程序所需的数据源的数量和种类将随着每个制造过程节点的增加而不断增长（参见图1）。数据源爆炸的问题在于，大多数数据源都使用定制的内部软件解决方案连接到工厂系统，并且收集的数据通常以对于初次使用的应用程序最方便的任何形式/位置存储。这些数据很少会存储在适合整个工厂通用的全面的工程数据库中。这导致系统架构的“混合式”风格，随着时间的流逝，它变得越来越难以理解和支持。显然，需要一种更好的方法。

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