Optical NEMS For Sensor Applications

机译：传感器应用的光学NEMS

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1. We have designed and tested a new class of optical NEMS devices utilizing laterally deformable gratings. 2. We have demonstrated the in-plane motion detection of 10 fm with a 1 Hz bandwidth in a device that is 2x6 microns in area. 3. Increasing the device area can allow us to improve the detection by more than 2 orders of magnitude. 4. We are in the process of incorporating this and related technologies into sensing systems with a broad range of applications. 5. Many other types of devices made possible with similar design 5.1 Tunable Filters 5.2 Optical modulators.

机译：我们已经设计并测试了一种利用横向可变形光栅的新型光学NEMS设备。 2.我们已经演示了在面积为2x6微米的设备中以1 Hz带宽进行10 fm的平面内运动检测。 3.增加设备面积可使我们将检测提高2个数量级以上。 4.我们正在将这项技术和相关技术整合到具有广泛应用的传感系统中。 5.相似设计使许多其他类型的设备成为可能5.1可调滤波器5.2光学调制器。

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《Knowledge Foundation's International Conference on Advances in Application of Integrated Commercial-Off-The Shelf Micro-Electro-Mechanical Systems(COTS MEMS 2003); 20031020-21; San Francisco,CA(US)》|2003年|P.1.1-1.13|共13页
会议地点 San FranciscoCA(US)
作者
Dustin W. Carr; B. E. N. Keeler; J. P. Sullivan; T. A. Friedmann; J. R. Wendt; G. R. Bogart;
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Sandia National Laboratories, Albuquerque, NM;

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正文语种 eng
中图分类半导体技术;
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5. Nonlinear dynamics and applications of MEMS and NEMS resonators [D] . Jin, Leisheng. 2015

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6. Editorial for the Special Issue on MEMS/NEMS Sensors: Fabrication and Application [O] . Goutam Koley 2019

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7. Integrated NEMS and optoelectronics for sensor applications. [O] . Czaplewski, David A., Serkland, Darwin Keith, Olsson, Roy H., III, 2008

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8. Integrated NEMS and optoelectronics for sensor applications. [R] . 2008

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Optical NEMS For Sensor Applications

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