• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Lab-on-a-Chip: Platforms, Devices, and Applications >Novel process to fabricate 3D microstructure joined with micro-channel for microfluidic application
【24h】

Novel process to fabricate 3D microstructure joined with micro-channel for microfluidic application

机译：制造微通道应用的3D微结构和微通道结合的新工艺

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

A novel process of casting the polydimethyl-siloxane (PDMS) microstructure with hybrid photoresists mold has been developed to fabricate the 3D microstructure. This new processing includes two parts: the 3D mother mold fabrication and PDMS casting processing. The 3D mother mold, which consists of the three-dimensional partial-spherical microstructure and micro channel, was successfully fabricated and characterized. The 3D micro structure and the micro channel of the mother mold, made of two different photosensitive materials, AZ100XT and SU8 photoresist respectively, are merged very smoothly at the joint area. A mother mold of a 2200-μm-diameter chamber with a 500-μm-width channel was presented in this paper. For the best precise dimensional control, we used this mother mold to fabricate the PDMS mold for PDMS casting processing. The surface average roughness of the final 3D structure is 30 nm. This novel processing provides a new technology for achieving smooth 3D chamber surface joined with microchannel. This new technology can be applied hi various lab-on-a-chip and microfluidic devices such as micropump and microvalve for which the great sealing, no dead volume and high back pressure are critical requirements. In this paper, the design, fabrication process and surface profile characterizations of this processing are presented in details.
机译：已经开发了一种使用混合光刻胶模具铸造聚二甲基硅氧烷（PDMS）微观结构的新工艺，以制造3D微观结构。此新处理包括两个部分：3D母模制造和PDMS铸造处理。由三维局部球形微结构和微通道组成的3D母模已成功制造和表征。母模的3D微观结构和微通道分别由两种不同的感光材料AZ100XT和SU8光致抗蚀剂制成，在接合区域非常平滑地融合。本文提出了一个直径为2200μm的腔室，其通道宽度为500μm的母模。为了获得最佳的精确尺寸控制，我们使用该母模制造用于PDMS铸造加工的PDMS模具。最终3D结构的表面平均粗糙度为30 nm。这种新颖的工艺提供了一种新技术，可实现与微通道连接的平滑3D腔室表面。这项新技术可以应用在各种微芯片实验室和微流体设备中，例如微型泵和微型阀，对于这些设备而言，高密封性，无死体积和高背压是至关重要的要求。在本文中，详细介绍了该工艺的设计，制造工艺和表面轮廓特征。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号