Maximizing laser ablation efficiency of silicon through optimization of the temporal pulse shape

著录项

• 来源
  《Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) XIX》|2014年|89670O.1-89670O.12|共12页
• 会议地点 San Francisco CA(US)
• 作者

  Alain Cournoyer; David Gay; Pascal Turbis; Emmanuel Lorin; Martin Briand; Yves Taillon;

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• 作者单位

  INO, 2740 Einstein Street, Quebec, QC, Canada G1P 4S4;

  INO, 2740 Einstein Street, Quebec, QC, Canada G1P 4S4;

  Centre de Recherche Mathematiques, Universite de Montreal, 2920 Chemin de la tour, Room 5357, Montreal, QC, Canada H3T 1J4;

  Centre de Recherche Mathematiques, Universite de Montreal, 2920 Chemin de la tour, Room 5357, Montreal, QC, Canada H3T 1J4, School of Mathematics and Statistics, Carleton University, 4302 Herzberg Laboratories, 1125 Colonel By Drive, Ottawa, ON, Canada K1S 5B6;

  INO, 2740 Einstein Street, Quebec, QC, Canada G1P 4S4;

  INO, 2740 Einstein Street, Quebec, QC, Canada G1P 4S4;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  Laser ablation; silicon; pulse shaping; stochastic optimization;

  机译：激光烧蚀；硅;脉冲整形随机优化;