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首页> 外文会议>Laser-based micro- and nanopackaging and assembly IV >Integration of electronics and photonics in active material by femtosecond laser for functional microdevice fabrication
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Integration of electronics and photonics in active material by femtosecond laser for functional microdevice fabrication

机译：飞秒激光将电子和光子学集成到活性材料中，用于功能性微器件制造

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摘要

Recently, hybrid integration of multifunctional micro-components for creating complex, intelligent microano systems has attracted significant attention. These microano systems have important applications in a variety of areas, such as healthcare, environment, communication, national security, and so on. Until now, fabrication of microano systems incorporated with different functions is still a challenging issue, which generally requires fabrication of micro-components beforehand followed by assembly and packaging procedures. Thus, the fabrication process is complex and costly. In recent years, the rapid development of femtosecond laser microfabrication technology has enabled direct fabrication and integration of multifunctional components, such as microfluidics, microoptics, micromechanics, microelectronics, etc., into a substrate. Particularly, in this talk, we show the use of femtosecond laser microfabrication for integrating microelectronics and microphotonics. Both microelectrodes and optical waveguides can be directly embedded in active materials after a femtosecond laser direct writing followed by electroless chemical plating. As examples, electric-optic (EO) modulators were fabricated in lithium niobate (LiNbO_3) crystal and their functions were demonstrated.
机译：最近，用于创建复杂的智能微/纳米系统的多功能微组件的混合集成引起了广泛的关注。这些微/纳米系统在医疗，环境，通信，国家安全等各个领域具有重要的应用。到目前为止，制造具有不同功能的微/纳米系统仍然是一个具有挑战性的问题，这通常需要事先制造微组件，然后进行组装和包装程序。因此，制造过程复杂且昂贵。近年来，飞秒激光微细加工技术的飞速发展使得能够将诸如微流体，微光学，微机械，微电子等多功能部件直接制造和集成到基板中。特别是，在本次演讲中，我们展示了飞秒激光微加工技术用于集成微电子学和微光子学的过程。飞秒激光直接写入，然后进行化学镀后，微电极和光波导都可以直接嵌入活性材料中。作为示例，在铌酸锂（LiNbO_3）晶体中制造了电光（EO）调制器，并演示了其功能。

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