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Flexible carbon micro-supercapacitors prepared by direct cw-laser writing

机译:通过直接连续激光写入制备的柔性碳微超级电容器

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Micro-ano-scale power supply units with high energy and high power densities are critical components for the development of compact miniaturized portable electronic devices. Supercapacitors have attracted many research attentions due to their high power density, robust cycle performance, pollution-free operation, and maintenance-free features. Besides, the properties of small size, light weight, and flexibility are also required. On-chip micro-supercapacitors (MSCs) have the potential acting as power supply units in portable devices, due to their simplified packaging processes and compatibility to the integrated circuits. However, the fabrication methods and materials should be cost-effective, scalable, and compatible to current electronic industry. Carbon materials own high specific surface areas, electrochemical stability, and high electrical conductivity, which are critical parameters for high-power supercapacitors. Moreover, the high mechanical tolerance makes them good candidates for flexible wearable devices. Therefore, MSCs based on carbon materials would satisfy the requirements of portable electronics. In this work, we demonstrated the fabrication of carbon MSCs by laser direct writing on commercial polyimide sheets in Ar with low-cost semiconductor cw-laser with a wavelength of 405nm. The obtained structures are macro-nanostructures comprising graphitized and amorphous carbon with relatively smooth surfaces and low resistance, in compared with the structures obtained by laser writing in air. As-prepared micro-supercapacitors show a high capacitance of about 14.9 mF/cm~2 at a scanning rate of 10 mV/s, which is comparable to the reported highest capacitance of carbon-based supercapacitors fabricated by pulse-laser writing.
机译:具有高能量和高功率密度的微/纳米级电源装置是开发紧凑型微型便携式电子设备的关键组件。超级电容器由于其高功率密度,强大的循环性能,无污染的操作和免维护的特性而吸引了许多研究关注。此外,还需要小尺寸,轻量和柔韧性的特性。片上微型超级电容器(MSC)由于其简化的封装过程和与集成电路的兼容性而具有在便携式设备中充当电源单元的潜力。但是,制造方法和材料应具有成本效益,可扩展性并与当前的电子工业兼容。碳材料具有高的比表面积,电化学稳定性和高电导率,这是大功率超级电容器的关键参数。此外,高机械公差使其成为柔性可穿戴设备的理想选择。因此,基于碳材料的MSC将满足便携式电子设备的要求。在这项工作中,我们演示了通过在Ar上的商用聚酰亚胺片上进行激光直接写入,并使用波长为405nm的低成本半导体CW激光器,来制造碳MSC。与通过在空气中激光写入所获得的结构相比,所获得的结构是包括具有相对光滑的表面和低电阻的石墨化和无定形碳的宏观纳米结构。所制备的微型超级电容器在10 mV / s的扫描速率下显示出约14.9 mF / cm〜2的高电容,这与通过脉冲激光写入制造的碳基超级电容器的最高报道电容相当。

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