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首页> 外文会议>Materials science amp; technology 2011 conference amp; exhibition >Quantitative evaluation of dissolved H2 concentration in silica glass by thermal desorption spectrometry in ultra-high vacuum
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Quantitative evaluation of dissolved H2 concentration in silica glass by thermal desorption spectrometry in ultra-high vacuum

机译：超高真空热解吸光谱法定量评估石英玻璃中溶解氢的浓度

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摘要

Hydrogen is one of the fundamental gaseous impurities in silica glass which affects onrnthe optical property. In 1987, Khotimchenko proposed the equation to calculate the H_2rnconcentration from the normalized intensity of H_2 vibration in Raman scattering (RS)rnspectroscopy on the basis of calibration by evaluation from mass spectrometry. While thisrnequation has been widely used and still now, the analytical techniques have been remarkablyrnprogressed after their work.rnIn this work, we made the quantitative evaluation of the H_2 concentrations in silicarnglasses by thermal desorption spectrometry (TDS) in ultra-high vacuum with the measurement ofrnthe H~+ -implanted standard sample. We also made clear the dissolved H_2 release, distinguishedrnfrom H_2 originated from surface hydrocarbon contamination in the ionization process forrndetection. The relationship between the H_2 concentration determined by TDS and thernnormalized intensity of H_2 vibration in RS spectroscopy will be also reported.
机译：氢是硅玻璃中基本的气态杂质之一，会影响光学性能。 1987年，霍姆琴科（Khotimchenko）提出了根据质谱法进行校正的方法，根据拉曼散射（RS）rn光谱中H_2振动的归一化强度，计算H_2rn浓度的方程。虽然这种方法已被广泛使用，但直到现在，分析技术已经取得了显着的进展。在这项工作中，我们通过热解吸光谱法（TDS）在超高真空下通过测量对硅玻璃中的H_2浓度进行了定量评估。注入H〜+的标准样品。我们还明确了溶解的H_2释放，区别于H_2源自电离过程检测中的表面烃污染。还将报道由TDS测定的H_2浓度与RS光谱中H_2振动的归一化强度之间的关系。

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