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Behavioral modeling and simulation of micromechanical resonator for communications applications

机译：用于通信应用的微机械谐振器的行为建模和仿真

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A method for modeling and simulating MEMS is presented for communications applications. This method includes the automatic generation of a simulation-ready description of the MEMS device including coupled electro-mechanical behavior extracted from a geometrical device description. In order to solve the lack of interoperability with simulators to perform MEMS analyses, the proposed method introduces a model output fully compatible with behavioral simulators such as those from Tanner Research®, Mentor Graphics®, Synopsys®, Agilent Technologies® and Cadence® for electronic simulations. This paper especially focuses on how to integrate a coupled-electromechanical model in an RF simulator like ADS from Agilent. The complete design flow is presented including layout design, automatic 3D model generation for 3D analysis, behavioral model generation and integration of the component into a circuit simulation. Two methods are presented- automatic generation of an electrical equivalent circuit for the MEMS device and- a method creating a fully non-linear device model which can be used as a black box within the circuit simulation environment. The paper presents an example based on a 10-MHz micromechanical resonator embedded within a Pierce oscillator circuit following the work of Nguyen. The model of the micromechanical resonator, a clamped-clamped beam that vibrates in a vertical displacement in response to an electrostatic excitation, is automatically created following the complete flow described above. The resonator has been analyzed at two levels: the device- and the system-level. On one hand, the intrinsic mechanical properties are obtained with the finite element method. On the other hand, the behavioral- and electrical equivalent circuit-models are generated from the finite element model by reducing the number of degrees of freedom. The analysis of the oscillator circuit is then performed with several RF simulators. In Nguyen's work, the author has simulated the oscillator circuit using an RLC-equivalent model of the micromechanical resonator. In contrast to the method presented in Nguyen article, the inclusion of coupled electro-mechanical behavior model in a circuit level simulation allows the representation of the non-li- near effects of the MEMS device. The simulation results, highly coherent with results obtained on the circuit that integrates the RLC-equivalent model, highlight this mechanical non-linearity.
机译：提出了一种用于通信应用的MEMS建模和仿真方法。此方法包括自动生成MEMS器件的仿真就绪描述，包括从几何器件描述中提取的耦合机电行为。为了解决与模拟器进行MEMS分析的互操作性不足的问题，所提出的方法引入了与行为模拟器完全兼容的模型输出，这些行为模拟器包括TannerResearch®，MentorGraphics®，Synopsys®，AgilentTechnologies®和Cadence®的电子仿真器。模拟。本文特别关注如何在RF仿真器（如安捷伦的ADS）中集成机电耦合模型。介绍了完整的设计流程，包括布局设计，用于3D分析的自动3D模型生成，行为模型生成以及将组件集成到电路仿真中。提出了两种方法-自动生成MEMS器件的等效电路和-创建完全非线性的器件模型的方法，该模型可以用作电路仿真环境中的黑匣子。本文介绍了一个基于Nguyen工作的，嵌入在Pierce振荡器电路中的10MHz微机械谐振器的示例。按照上述完整流程，会自动创建微机械谐振器的模型，该模型是响应于静电激励以垂直位移振动的夹紧梁。谐振器已从两个层面进行了分析：设备层面和系统层面。一方面，通过有限元方法获得了固有的力学性能。另一方面，行为和电气等效电路模型是通过减少自由度的数量从有限元模型生成的。然后用几个RF仿真器进行振荡器电路的分析。在Nguyen的工作中，作者使用微机械谐振器的RLC等效模型模拟了振荡器电路。与Nguyen文章中介绍的方法相反，在电路级仿真中包含耦合的机电行为模型可以表示MEMS器件的非近效应。仿真结果与在集成了RLC等效模型的电路上获得的结果高度一致，突显了这种机械非线性。

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