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Application of Auger electron spectroscopy (AES), TEM electron energy loss spectrum (EELS) in failure analysis on poly grooves issue in wafer fabrication

机译：俄歇电子能谱（AES），TEM电子能量损失谱（EELS）在晶片制造中多槽问题的失效分析中的应用

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In this paper, a case study on the failure analysis and yield enhancement on poly grooves/divots in wafer fabrication was investigated and studied. Several failure analysis techniques and tools such as SEM, Auger electron spectroscopy (AES) and transmission electron microscopy electron energy loss spectrum (TEM EELS) were used in the course of the failure analysis to understand the root cause/mechanism relating to poly groove issues. The poly grooves occurred on the interface of the P+/N+ poly was due to missing oxide as a result of the resist not removed and caused chemical attack in the subsequent spacer etch.

机译：本文以晶圆制造中多槽/沟槽的失效分析和良率提高为例，进行了研究。在故障分析过程中，使用了几种故障分析技术和工具，例如SEM，俄歇电子能谱（AES）和透射电子显微镜电子能量损失谱（TEM EELS），以了解与多沟槽问题相关的根本原因/机制。在P + / N +多晶硅界面上出现的多晶硅沟槽是由于未去除抗蚀剂而丢失了氧化物，并在随后的间隔层蚀刻中引起了化学侵蚀。

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《》|2004年|P.5|共1页
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作者
Phong Ooi Lin; Ang Ghim Boon; Chua Kok Keng; Oh Chong Khiam; Lo Keng Foo;
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中图分类工业技术;
关键词
Auger electron spectroscopy; MIS structures; electron energy loss spectra; failure analysis; reliability; resists; semiconductor device manufacture; transmission electron microscopy; Auger electron spectroscopy; chemical attack; electron energy loss spectrum; failu;

机译：俄歇电子能谱; MIS结构;电子能量损失谱;失效分析;可靠性;抗蚀剂;半导体器件制造;透射电子显微镜;俄歇电子能谱;化学侵蚀;电子能量损失谱;

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专利

1. Auger electron spectroscopy (AES) and electron energy loss spectroscopy (EELS) studies of GaP and Si surfaces [J] . Paparazzo E., Moretto L., Brolatti M. Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2002,第2期

机译：GaP和Si表面的俄歇电子能谱（AES）和电子能量损失能谱（EELS）研究
2. INTERDISCIPLINARY SURFACE STUDIES ON POROUS SILICON (PSI) .2. CATHODOLUMINESCENCE (CL), AUGER (AES), ELECTRON ENERGY LOSS (EELS) AND RAMAN SPECTROSCOPY OF DIFFERENT PSI SAMPLES [J] . Jardin C., Vazsonyi E., Gergely G., Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 1995,第5a6期

机译：多孔硅（PSI）的跨学科表面研究.2。不同PSI样品的阴极发光（CL），俄歇（AES），电子能量损失（EELS）和拉曼光谱
3. Investigating carbonization and graphitization using electron energy loss spectroscopy (EELS) in the transmission electron microscope (TEM) [J] . Daniels H, Brydson R, Rand B, Philosophical magazine: structure and properties of condensed matter . 2007,第25a27期

机译：使用透射电子显微镜（TEM）中的电子能量损失谱（EELS）研究碳化和石墨化
4. Application of Auger electron spectroscopy (AES), TEM electron energy loss spectrum (EELS) in failure analysis on poly grooves issue in wafer fabrication [C] . Phong Ooi Lin, Ang Ghim Boon, Chua Kok Keng, IEEE International Conference on Semiconductor Electronics . 2004

机译：螺旋钻电子光谱（AES），TEM电子能损谱（EELS）在晶圆制造中的聚槽问题故障分析中的应用
5. Characterization of the electronic and geometric structures of aluminas using X-ray photoelectron spectroscopy, Auger electron spectroscopy, electron energy loss spectroscopy, and low energy electron diffraction. [D] . Kao, Chi-Chang. 1988

机译：使用X射线光电子能谱，俄歇电子能谱，电子能量损失能谱和低能电子衍射来表征氧化铝的电子和几何结构。
6. H2O2 localization in the green alga Micrasterias after salt and osmotic stress by TEM-coupled electron energy loss spectroscopy [O] . Anza Darehshouri, Ursula Lütz-Meindl -1

机译：透射电镜耦合电子能量损失谱法分析盐和渗透胁迫后绿藻微囊中的H2O2定位
7. Electron-Energy Loss Spectroscopy (Eels) Of Organic-Molecules In Vapor-Phase - Design And Fabrication Of An Indigenous Eel Spectrometer [O] . Hegde MS, Jayaram V, Kamath PV, 1985

机译：气相中有机分子的电子能量损失谱（Eels）-本地鳗光谱仪的设计和制造
8. AES (Auger Electron Spectroscopy) and EELS (Electron Energy Loss Spectroscopy) Analysis of TlBaCaCuO(sub X) Thin Films at 300 K and at 100 K [R] . Nelson, A. J. , Swartzlander, A. , Kazmerski, L. L. , 1988

机译：在300 K和100 K下的TlBaCaCuO（sub X）薄膜的aEs（俄歇电子能谱）和EELs（电子能量损失光谱）分析

Application of Auger electron spectroscopy (AES), TEM electron energy loss spectrum (EELS) in failure analysis on poly grooves issue in wafer fabrication

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