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Fast fab scheduling rule selection by ordinal comparison-based simulation

机译:通过基于序数比较的仿真快速选择晶圆厂调度规则

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In this paper, an ordinal comparison (OC)-based simulation tool is designed and applied to achieve fast selection of wafer release and lot dispatching rule combination for fab operations. By comparing relative orders of performance among scheduling rules to a specified level of confidence, the OC approach reduces simulation time significantly. The tool consists of (1) a discrete event simulator, (2) a fab model database, (3) a library of scheduling rules, (4) a library of performance indices, (5) an ordinal comparator, and (6) a computation budget allocation. Rule selections from a set of prominent fab scheduling rules under frequently considered fab performance indices such as mean and variance of cycle time and smoothness are studied over various time horizons by using a benchmark fab model. Results demonstrate a potential improvement in efficiency over traditional simulation by two orders of magnitude. In addition to insights about static selection of rules over various objectives and time horizons, our simulation studies also indicate the necessity of dynamic selection.
机译:本文设计并应用了一种基于序数比较(OC)的仿真工具,以实现晶圆生产的晶圆释放和批次分配规则组合的快速选择。通过将调度规则之间的性能相对顺序与指定的置信度进行比较,OC方法可以显着减少仿真时间。该工具包括(1)离散事件模拟器,(2)晶圆厂模型数据库,(3)调度规则库,(4)性能指标库,(5)序数比较器和(6)a计算预算分配。通过使用基准晶圆厂模型研究了在各种时间范围内经常考虑的晶圆厂性能指标(例如周期时间的均值和方差和平滑度)下一组重要的晶圆厂调度规则中的规则选择。结果表明,与传统仿真相比,效率有可能提高两个数量级。除了对在各种目标和时间范围内静态选择规则的见解之外,我们的仿真研究还表明了动态选择的必要性。

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