Abstract: MicroOptoElectroMechanical (MOEM) devices include boththe application of micromechanics to controlmicro-optical systems and the application ofmicro-optical systems to provide monitoring andfeedback for micromechanical systems. This paperpresents microsystem applications at Sandia NationalLaboratories that require the integration ofmicromechanics with transmissive and reflectivemicro-optical systems to achieve specific functions.The goal of the presentation is to provide 'systempull' by discussing the enhanced functionality ofMOEMS. In particular, this paper describes MOEM systemsbased on polycrystalline silicon sacrificial SurfaceMicroMachining (SMM) devices. In one example, anenvironmental sensor, a Gallium Arsenide (GaAs)Photonic Integrated Circuit (PIC) is assembled with anSMM device and an Application-Specific IntegratedCircuit (ASIC) to achieve a specific function. The PICis used to monitor the SMM device. The PIC output isprocessed by the ASIC to generate a specific signal.The second system illustrates the micromechanicalcontrol of an optical beam. This system consists of anSMM shutter device that has been post-processed usingHigh Aspect Ratio Silicon Etching (HARSE) to accept aVertical Cavity Surface Emitting Laser (VCSEL). Anothersystem in the early stages of development is an SMMmechanical timer, which illustrates the need for thedevelopment of compact, multi-channel micro- opticalmonitoring technologies. !15
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