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A study on gas desorption from inductively coupled plasma chamberwall by optical emission spectroscopy method

机译：电感耦合等离子体室气体解吸的研究发光光谱法检测墙体

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Summary form only given. In nitriding stainless steel experimentsin RF inductively coupled plasma chamber, optical emission spectroscopy(OES) measurements were carried out within the visible range. The gasesused for these experiments were pure nitrogen and hydrogen, while theemission was dominated by nitrogen species and almost independent oftheir composition ratios, provided that the other discharge conditionsremained unchanged. The gas desorbed from both the inner wall of vacuumchamber and substrate-holder surface produced significant influence onthe emission intensities and even caused the discharge to be unstable tosome extent. To reduce the effect of desorption on discharge, a seriesof experiments were carried out namely, without any conditioning, zerotime-gap conditioning, and 1 hour time-gap conditioning prior tonitriding SS (stainless steel) 304 samples. The characteristics of theplasma, observed by OES method, at different conditioning conditions andtheir effects on the quality of nitrided layers will be reported indetail
机译：仅提供摘要表格。在渗氮不锈钢实验中 在射频电感耦合等离子体室中，发射光谱 （OES）测量在可见范围内进行。气体 这些实验中使用的是纯氮气和氢气，而 排放主要由氮物种决定，并且几乎与 它们的组成比，前提是其他放电条件 保持不变。气体从真空内壁两面解吸 室和基板支架表面对 发射强度甚至导致放电不稳定 在某种程度上。为了减少解吸对放电的影响，一系列 在没有任何条件的情况下进行了零个实验 时间间隔调节，以及在开始之前1小时的时间间隔调节 渗氮SS（不锈钢）304个样品。的特点 在不同的调节条件下，通过OES方法观察到的血浆 它们对氮化层质量的影响将在 细节

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