LANGMUIR PROBE AND OPTICAL EMISSION SPECTROSCOPY STUDY OF AN INDUCTIVELY COUPLED PLASMA SOURCE

机译：电感耦合等离子体源的朗缪尔探针和光发射光谱研究

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The plasma produced in an ICP test reactor was studied by Langmuir probe and spectroscopy techniques. Radial profiles of the electron density and temperature were determined for different gas pressures, RF powers and gas compositions. Whereas Ar plasmas showed higher electron density, nitrogen containing plasmas present higher uniformity and higher temperature. The influence of Ar metastables is discussed by the comparison of Ar emission lines.

机译：通过Langmuir探针和光谱技术研究了ICP测试反应器中产生的等离子体。对于不同的气压，RF功率和气体成分，确定了电子密度和温度的径向分布。 Ar等离子体显示较高的电子密度，而N等离子体显示较高的均匀性和较高的温度。通过比较Ar发射谱线讨论了Ar亚稳的影响。

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《Proceedings vol.2005-08; International Symposium on Microelectronics Technology and Devices(SBMICRO 2005); 200509;》|2005年|P.245-253|共9页
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作者
A. M. Daltrini; M. J. R. Monteiro; A. Kostryukov; S. A. Moshkalyov; M. Machida; E. Besseler;
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作者单位

Centro de Componentes Semicondutores - Universidade Estadual de Campinas CEP 13083-870, C.P. 6061, Campinas, SP, Brazil;

Instituto de Fisica "Gleb Wataghin"- Universidade Estadual de Campinas CEP 13083-970, Campinas, SP, Brazil;

On leave from Plasma Physic;

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正文语种 eng
中图分类微电子学、集成电路（IC）;
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LANGMUIR PROBE AND OPTICAL EMISSION SPECTROSCOPY STUDY OF AN INDUCTIVELY COUPLED PLASMA SOURCE

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