METAL DEFECTS LOCALIZATION WITH A NOVEL LARGE AREA TEST STRUCTURE

机译：新型大面积测试结构的金属缺陷定位

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This paper presents a new structure for metal defectivity which allows with a set of simple measures to find out and locate metal shorts. It consists of two interdigitated metal combs with 6 snakes meandering within the combs. After the defect position has been established further analysis can be performed to understand the failure mechanism.

机译：本文提出了一种用于金属缺陷的新结构，该结构允许通过一套简单的措施来发现和定位金属短路。它由两个相互交叉的金属梳子组成，在梳子中蜿蜒着6条蛇。在确定缺陷位置后，可以进行进一步分析以了解故障机理。

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《International VLSI multilevel interconnection conference;VMIC》|2000年|p.311-313|共3页
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G.Magri; B.Zanderighi;
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中图分类无线电电子学、电信技术;
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1. An Advanced Defect-Monitoring Test Structure for Electrical Screening and Defect Localization [J] . Yuichi Hamamura, Takayuki Kumazawa, Kazuyuki Tsunokuni, IEEE Transactions on Semiconductor Manufacturing . 2004,第2期

机译：用于电气筛选和缺陷定位的高级缺陷监控测试结构
2. An advanced defect-monitoring test structure for electrical screening and defect localization [J] . Hamamura Y., Kumazawa T., Tsunokuni K., IEEE Transactions on Semiconductor Manufacturing . 2004,第2期

机译：用于电气筛选和缺陷定位的高级缺陷监视测试结构
3. Modeling of real defect outlines and parameter extraction using a checkerboard test structure to localize defects [J] . Hess C., Stroele A.P. IEEE Transactions on Semiconductor Manufacturing . 1994,第3期

机译：使用棋盘测试结构对实际缺陷轮廓进行建模并提取参数以定位缺陷
4. Electrical Defect Density Test Structures for DFM in the Sub-wavelength Lithography Regime with Copper Metallization [C] . Julie Segal, Go Nagatani, Cyrus Tabery International Symposium on Semiconductor Manufacturing . 2006

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5. Optical bullets in (2+1)D photonic structures and their interaction with localized defects. [D] . Dohnal, Tomas. 2005

机译：（2 + 1）D光子结构中的光学子弹及其与局部缺陷的相互作用。
6. Ultra-High Refractive Index Sensing Structure Based on a Metal-Insulator-Metal Waveguide-Coupled T-Shape Cavity with Metal Nanorod Defects [O] . Yuan-Fong Chou Chau, Chung-Ting Chou Chao, Hung Ji Huang, 2019

机译：基于金属 - 绝缘子 - 金属波导耦合的T形腔的超高折射率传感结构金属纳米棒缺陷
7. Scanning thermal testing of subsurface defects in metal – coating structures [O] . A. Chulkov, B. Oswald-Tranta, C. Tuschl, 2020

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8. Formation of defect structures in metals during irradiation. Summary of plenary discussion session Part 1. [R] . H. Wiedersich V. Naundorf 1991

机译：在照射过程中金属中缺陷结构的形成。全体讨论会议摘要第1部分。

METAL DEFECTS LOCALIZATION WITH A NOVEL LARGE AREA TEST STRUCTURE

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