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A STUDY OF EFFECTS OF POLISHING PARTICLE DISTRIBUTIONS ON SURFACE CHARACTERISTICS

机译:抛光颗粒分布对表面特性的影响研究

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摘要

In this paper, a simple model is established to study effects of polishing particle distributions on surface characteristics. Verification experiments are also conducted to evaluate the feasibility of this model. It is shown that the proposed model can more accurately predict the surface characteristics of the polished disk than the popular Preston equation does. Although the verification tests are carried out on a double-side polishing machine by using aluminum disks as test samples, it is believed that the proposed model might be applied to different polishing machine or different polished materials.
机译:在本文中,建立了一个简单的模型来研究抛光颗粒分布对表面特性的影响。还进行了验证实验,以评估该模型的可行性。结果表明,与流行的普雷斯顿方程相比,所提出的模型可以更准确地预测抛光盘的表面特性。尽管验证测试是通过使用铝盘作为双面试样在双面抛光机上进行的,但是可以相信,所提出的模型可以应用于不同的抛光机或不同的抛光材料。

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