CMP slurry management involves far more than a single component of equipment. As a result, improvement in a total management system for any type of process, whether CMP or other, is the product of incremental advances in many of the parts. Early bulk slurry delivery systems functionally replaced or automated the task of hauling drums of slurry to a polisher. Today's CMP slurry management systems combine the "latest-greatest" products of a number of suppliers working together to supply healthy slurry for today's CMP processes. This paper will look at some of the evolving concerns about CMP slurry health, improvements in metrology, assay control, pressure control, and piping design, especially as we move into copper CMP.
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