Lithographic Behavior of Carboxylate Based Dissolution Inhibitors and the Effect of Blending

机译：羧酸盐型溶解抑制剂的平版印刷行为及其共混作用

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摘要

We report on a lithographic study of the behavior of non-cholate tert-butylcarboxylate dissolution inhibitor (DI's) formulated in a poly(norbornene/maleic anhydride/acrylic acid/tert-butyl acrylate) 193 nm single layer resin. A comparison is made between formulations containing non-cholate DI's, cholate based DI's and formulations containing blends of the two different types of DI's. It was found that formulations containing the non-cholate materials tended to give T-topped profiles while the formulations containing cholate based materials and blends containing as little as 1% cholate based DI did not.

机译：我们报道了在聚（降冰片烯/马来酸酐/丙烯酸/丙烯酸叔丁酯）193 nm单层树脂中配制的非胆酸盐叔丁基羧酸盐溶解抑制剂（DI）的行为的光刻研究。在包含非胆甾醇DI的制剂，基于胆酸盐的DI的制剂和包含两种不同类型的DI的混合物的制剂之间进行比较。发现含有非胆酸盐材料的配方倾向于产生T-top分布，而含有胆酸盐基材料的配方和含有低至1％胆酸盐基DI的共混物则没有。

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来源
《Advances in Resist Technology and Processing XVIII》|2001年|p.703-711|共9页
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作者
Frank M. Houlihan; Zhenglin Yan; Elsa Reichmanis; Gary Dabbagh; Kevin Bolan; Om Nalamasu; Ilya Rushkin; Ognian Dimov;
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中图分类无线电电子学、电信技术;
关键词
dissolution inhibitors; 193 nm; blending;

机译：溶解抑制剂; 193纳米;混合;

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Lithographic Behavior of Carboxylate Based Dissolution Inhibitors and the Effect of Blending

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