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Chemical mapping of three-dimensional microstructures fabricated by two-photon polymerization using CARS microscopy

机译：使用CARS显微镜通过双光子聚合制备的三维微观结构的化学作图

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摘要

Two-photon polymerization (TPP) is an enabling technology that allows fast prototyping of parts with sub-100 nm resolution. Due to its ability to fabricate microstructures with arbitrary three-dimensional geometries, TPP has been employed in diverse fields such as photonics, microelectronics, microelectromechanical systems, and microfluidics. However, no information is available to date that microscopically correlates the experimental conditions used in TPP with the properties of the ultimate microstructure. We present a study where the distribution of polymer cross-linking in three-dimensional microstructures fabricated by TPP is visualized by means of nonlinear microscopy. In particular, coherent anti-Stokes Raman scattering (CARS) microscopy is employed to image polymer microstructures with chemical specificity. The characterization of the microstructures based on the acquired images permits rational optimization of the TPP process.
机译：双光子聚合（TPP）是一项使能技术，可对分辨率低于100 nm的零件进行快速原型制作。由于TPP具有制造具有任意三维几何形状的微结构的能力，TPP已被用于各种领域，例如光子学，微电子学，微机电系统和微流体学。但是，迄今为止，尚无任何信息可以将TPP中使用的实验条件与最终微观结构的特性进行微观关联。我们提出了一项研究，其中通过非线性显微镜观察了由TPP制造的三维微观结构中聚合物交联的分布。特别地，相干抗斯托克斯拉曼散射（CARS）显微镜用于对具有化学特异性的聚合物微结构进行成像。基于所获取图像的微结构的表征允许TPP工艺的合理优化。

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