ALUMINUM OXIDE AND SILICON NITRIDE THIN FILMS AS ANTI-CORROSION LAYERS

机译：氧化铝和氮化硅薄膜作为防腐蚀层

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To reduce the weight of a vehicle, magnesium-aluminum alloys may be utilized. However, when such alloys are in contact with carbon steel fasteners, electrochemical corrosion takes place. To reduce the corrosion, ceramic thin film coatings have been proposed as barrier layers. This study focused on the feasibility of utilizing an aluminum oxide coating or a silicon nitride coating as a barrier layer. The aluminum oxide coating was fabricated via an electron beam evaporation technique, and the silicon nitride coating was fabricated via a plasma deposition technique. The substrates were 1050 carbon steel plates. The anticorrosion behavior of each coating was evaluated via the electrochemical impedance spectroscopy. Thin film coating characteristics were further investigated by scanning electron microscopy and energy dispersive X-ray spectroscopy.

机译：为了减少车辆的重量，可以使用镁 - 铝合金。然而，当这种合金与碳钢紧固件接触时，发生电化学腐蚀。为了减少腐蚀，已经提出了陶瓷薄膜涂层作为阻挡层。该研究专注于利用氧化铝涂层或氮化硅涂层作为阻挡层的可行性。通过电子束蒸发技术制造氧化铝涂层，通过等离子体沉积技术制造氮化硅涂层。基板是1050个碳钢板。通过电化学阻抗光谱评估每种涂层的防腐行为。通过扫描电子显微镜和能量分散X射线光谱进一步研究薄膜涂层特性。

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《International conference on advanced ceramics and composites》|2010年||共12页
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C. Qu; P. Li; J. Fan; D. Edwards; W. Schulze; G. Wynick; R. E. Miller; L. Lin; Q. Fang; K.Bryson; H. Rubin; X. W. Wang;
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1. ALUMINUM OXIDE AND SILICON NITRIDE THIN FILMS AS ANTI-CORROSION LAYERS [J] . C. Qu, P. Li, J. Fan, Ceramic Engineering and Science Proceedings . 2010,第3期

机译：氧化铝和氮化硅薄膜作为抗腐蚀层
2. Mid-infrared optical properties of thin films of aluminum oxide, titanium dioxide, silicon dioxide, aluminum nitride, and silicon nitride [J] . Jan Kischkat, Sven Peters, Bernd Gruska, Applied optics . 2012,第28期

机译：氧化铝，二氧化钛，二氧化硅，氮化铝和氮化硅薄膜的中红外光学性质
3. Mid-infrared optical properties of thin films of aluminum oxide, titanium dioxide, silicon dioxide, aluminum nitride, and silicon nitride [J] . Jan Kischkat, Sven Peters, Bernd Gruska, Applied optics . 2012,第28期

机译：氧化铝，二氧化钛，二氧化硅，氮化铝和氮化硅薄膜的中红外光学性质
4. ALUMINUM OXIDE AND SILICON NITRIDE THIN FILMS AS ANTI-CORROSION LAYERS [C] . C. Qu, P. Li, J. Fan, Advanced ceramic coatings and interfaces V . 2010

机译：氧化铝和氮化硅薄膜作为抗腐蚀层
5. Thermal stability of strontium iron oxide/silicon dioxide/silicon and strontium iron oxide/aluminum oxide thin film systems: Transmission electron microscopy study of interfacial structures of the thin film systems and conductometric sensing response of strontium iron oxide/aluminum oxide. [D] . Wang, Dashan. 2008

机译：氧化锶铁/二氧化硅/硅和氧化锶铁/氧化铝薄膜系统的热稳定性：透射电子显微镜研究薄膜系统的界面结构和氧化锶铁/氧化铝的电导传感响应。
6. Atomic Layer Deposition of Silicon Nitride Thin Films: A Review of Recent Progress Challenges and Outlooks [O] . Xin Meng, Young-Chul Byun, Harrison S. Kim, 2016

机译：氮化硅薄膜的原子层沉积：近期进展挑战和前景的回顾
7. Improving the Microstructure and Electrical Properties of Aluminum Induced Polysilicon Thin Films Using Silicon Nitride Capping Layer [O] . Min-Hang Weng, Cheng-Tang Pan, Chien-Wei Huang, 2014

机译：用氮化硅覆盖层提高铝诱导多晶硅薄膜的微观结构和电性能
8. Pull-test adhesion measurements of diamondlike carbon films on silicon carbide, silicon nitride, aluminum oxide, and zirconium oxide [R] . Erck, R. A., Nichols, F. A., Dierks, J. F. 1993

机译：在碳化硅，氮化硅，氧化铝和氧化锆上测量金刚石碳膜的拉伸测试附着力

ALUMINUM OXIDE AND SILICON NITRIDE THIN FILMS AS ANTI-CORROSION LAYERS

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