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OUT-DIFFUSION OF METAL FROM GRAIN BOUNDARIES IN MULTICRYSTALLINE SILICON DURING THERMAL PROCESSING

机译:热加工过程中多晶硅中晶界中金属的向外扩散

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For multicrystalline silicon, the principal understanding of gettering and other high temperatureprocesses is important for the optimisation of the solar cell performance. We studied this issue by examining theminority carrier density distribution before and after thermal oxidation with spatially resolved and injectiondependent lifetime methods. Experiments with different temperature ramps and times were done on two differentstarting materials. On pre-gettered material, results led to the hypothesis, that grain boundaries decorated withprecipitates emit interstitial iron atoms into their vicinity. Simulations strongly supported this theory of out-diffusion.On the material without pre-gettering more processes go on simultaneously. Out-diffusion could be found again, butmostly superimposed by other processes, allocated to surface gettering or clustering.
机译:对于多晶硅,对吸杂和其他高温的基本了解 工艺对于优化太阳能电池性能很重要。我们通过检查 热氧化前后空间分布和注入的少数载流子密度分布 依赖寿命方法。在两个不同的温度下进行了不同的温度变化和时间的实验 起始材料。在预先吸气的材料上,结果导致了假说,即晶界装饰有 沉淀物将间隙铁原子发射到其附近。模拟强烈支持这种外扩散理论。 在不进行预吸气的情况下,可以同时进行更多的过程。可以再次发现向外扩散,但是 大部分与其他过程叠加,分配给表面吸气或聚类。

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