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首页> 外文会议>European photovoltaic solar energy conference >STUDY OF SOLID PHASE CRYSTALLIZED SILICON THIN FILMS DEPOSITED BY HIGH RATE ELECTRON BEAM EVAPORATION FOR THE USE AS ABSORBER LAYERS IN SOLAR CELLS
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STUDY OF SOLID PHASE CRYSTALLIZED SILICON THIN FILMS DEPOSITED BY HIGH RATE ELECTRON BEAM EVAPORATION FOR THE USE AS ABSORBER LAYERS IN SOLAR CELLS

机译：高速电子束蒸发沉积固相晶化硅薄膜用作太阳能电池吸收层的研究

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Solid phase crystallization of amorphous silicon thin films was studied. Silicon layers were depositedonto silicon nitride coated glass or bare glass substrates by high rate electron beam evaporation. Influence ofdeposition conditions –i.e. substrate type and deposition temperature– on the crystallization process was investigated.Structure of the films at various stages of crystallization was analyzed by means of Raman spectroscopy and X-raydiffraction. Coatings deposited at higher substrate temperature and on bare glass substrate crystallize faster. This isdue to various degree of disorder in the silicon films. Short range order has been found to be good in as-depositedstate and insensitive to deposition conditions. It does not improve upon annealing. It was shown that reordering inamorphous silicon upon crystallization occurs on a medium length scale. Medium range order in starting amorphousmaterial is improved at higher deposition temperature and on bare glass substrate. This accounts for shorterincubation time and higher nucleation and growth rate. This understanding of solid phase crystallization mechanismand kinetics thus enables one to tailor the microstructure of polycrystalline silicon thin films through the modificationof amorphous starting layers medium range order. The aim is to meet the requirements for the use as absorber layersin thin film solar cells.
机译：研究了非晶硅薄膜的固相结晶。沉积硅层 通过高速率电子束蒸发将其涂在氮化硅涂层的玻璃或裸露的玻璃基板上。的影响 沉积条件-即研究了衬底类型和沉积温度–对结晶过程的影响。 通过拉曼光谱和X射线分析了在结晶的各个阶段的膜的结构。 衍射。在较高的基板温度下和在裸露的玻璃基板上沉积的涂层结晶更快。这是 由于硅膜中各种程度的无序。发现短程订单在存入时是好的 状态且对沉积条件不敏感。退火后不会改善。结果表明，在 结晶时的非晶硅以中等长度尺度发生。起始非晶态的中等范围顺序 在较高的沉积温度下和在裸露的玻璃基板上可以改善材料。这占较短 孵育时间长，成核和生长速率高。对固相结晶机理的了解 因此，动力学可以使人们通过修改来定制多晶硅薄膜的微观结构 无定形起始层的中等范围有序。目的是满足用作吸收层的要求 在薄膜太阳能电池中。

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