Laser-Anneal of Metal-based Micro Optical Scanner Derived by Aerosol Deposition

机译：由气溶胶沉积衍生的金属基微光学扫描器的激光退火

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To retain the driving properties of metal-based micro optical scanner derived by aerosol deposition (AD) technique, CO_2 laser irradiation was used to anneal the PZT films deposited onto the stainless-steel substrate. Stainless-steel mirror and frame of the scanner with the film annealed by laser irradiation maintained their metallic luster. The scanner with the film annealed by laser irradiation at 600 °C for 1 min has a scanning angle over 30 degree that is comparable with the scanning angle of a similar scanner annealed by electric furnace at 600 °C for 10 min.

机译：为了保留由气溶胶沉积（AD）技术得出的金属基微光学扫描器的驱动性能，使用CO_2激光照射来退火沉积在不锈钢基板上的PZT薄膜。不锈钢镜像和扫描仪的框架通过激光照射退火，保持其金属光泽。具有600℃的激光照射的扫描仪在600℃下退火1分钟，具有超过30度的扫描角度，与600℃的电炉退火的类似扫描仪的扫描角度相当。

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《Electronics Division Meeting of the Ceramic Society of Japan》|2009年||共4页
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中图分类电工陶瓷材料;
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laser-anneal; aerosol deposition; PZT film; stainless-steel substrate; metal-based; micro optical scanner;

机译：激光退火;气溶胶沉积;PZT薄膜;不锈钢基材;金属基于金属;微光学扫描仪;

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1. Laser-anneal Of Metal-based Micro Optical Scanner Derived By Aerosol Deposition [J] . So Baba, Jae-Hyuk Park, Harumichi Sato, Key Engineering Materials . 2009,第期

机译：气溶胶沉积衍生的金属基微光学扫描仪的激光退火
2. High-speed metal-based optical microscanners using stainless-steel substrate and piezoelectric thick films prepared by aerosol deposition method [J] . Jae-Hyuk Park, Jun Akedo, Harumichi Sato Sensors and Actuators, A. Physical . 2007,第1期

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3. Improved identification of the solution space of aerosol microphysical properties derived from the inversion of profiles of lidar optical data, part 2: simulations with synthetic optical data [J] . Kolgotin Alexei, Mueller Detlef, Chemyakin Eduard, Applied optics . 2016,第34期

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4. Laser-Anneal of Metal-based Micro Optical Scanner Derived by Aerosol Deposition [C] . So Baba, Jae-Hyuk Park, Harumichi Sato, Electronics Division Meeting of the Ceramic Society of Japan . 2009

机译：气溶胶沉积衍生的金属基微光学扫描仪的激光退火
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Laser-Anneal of Metal-based Micro Optical Scanner Derived by Aerosol Deposition

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