Microfabrication of Thermoelectric Hydrogen Sensor using KOH solution etching

机译：使用KOH溶液蚀刻的热电氢传感器的微制造

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Micromachined sensors are a new generation of sensor technology combining existing integrated circuit fabrication technology with novel deposition and etching processing. In the viewpoint of low-power operation, high sensitivity and fast response speed of thermoelectric hydrogen sensor (THS), we prepared the micromachined thermoelectric hydrogen sensor (micro-THS) with the combination of the thermoelectric effect of SiGe thin film and the Pt-catalyzed exothermic reaction of hydrogen oxidation. The power consumption of the micro-THS was greatly reduced to be 50 mW for 100 °C operating, by the Pt-micro-heater on single membrane. The micro-THS with 40 wt.% Pt/alumina catalyst showed voltage signal of 10 mV for 1 % H{sub}2 in air.

机译：微机械传感器是一种新一代传感器技术，结合了具有新型沉积和蚀刻加工的现有集成电路制造技术。在低功率操作的观点出发，热电氢传感器（THS）的高灵敏度和快速响应速度，我们用SiGe薄膜的热电效应的组合制备了微机械的热电氢传感器（微动脉）和PT-催化氧化的放热反应。通过单个膜上的PT微加热器，微长度的功耗大大降低为100°C操作的50 MW。具有40重量％的微约30重量％。％Pt /氧化铝催化剂在空气中显示出10mV的电压信号为1％H {um} 2。

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来源
《Electronics Division Meeting of the Ceramic Society of Japan》|2005年||共4页
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作者
Kazuki Tajima; Yeongsoo Choi; Woosuck Shin; Noriya Izu; Ichiro Matsubara; Norimitsu Murayama;
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中图分类 TQ174-532;
关键词
Wet etching; Thermoelectric; Hydrogen sensor; Micro-hotplate; Catalyst;

机译：湿法蚀刻;热电;氢气传感器;微型机板;催化剂;

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1. Microfabrication of Thermoelectric Hydrogen Sensor using KOH solution etching [J] . Kazuki Tajima, Yeongsoo Choi, Woosuck Shin, Key Engineering Materials . 2006,第期

机译：使用KOH溶液蚀刻对热电氢传感器进行微细加工
2. Silicon anisotropic etching in alkaline solutions III: On the possibility of spatial structures forming in the course of Si(100) anisotropic etching in KOH and KOH + IPA solutions [J] . Irena Zubel Sensors and Actuators, A. Physical . 2000,第1a2期

机译：碱性溶液中的硅各向异性刻蚀III：关于在KOH和KOH + IPA溶液中Si（100）各向异性刻蚀过程中形成空间结构的可能性
3. Silicon anisotropic etching in alkaline solutions III: On the possibility of spatial structures forming in the course of Si(100) anisotropic etching in KOH and KOH plus IPA solutions [J] . Zubel I. Sensors and Actuators, A. Physical . 2000,第1a2期

机译：碱性溶液中的硅各向异性蚀刻III：关于在KOH和KOH加IPA溶液中Si（100）各向异性蚀刻过程中形成空间结构的可能性
4. Microfabrication of Thermoelectric Hydrogen Sensor using KOH solution etching [C] . Kazuki Tajima, Yeongsoo Choi, Woosuck Shin, Electronics Division Meeting of the Ceramic Society of Japan . 2005

机译：使用KOH溶液蚀刻的热电氢传感器的微制造
5. A kinetic study of gallium arsenide etching in hydrogen peroxide-amonium hydroxide-water solutions. [D] . Bryce, Christine. 1997

机译：在过氧化氢-氢氧化铵-水溶液中腐蚀砷化镓的动力学研究。
6. Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution [O] . Han Lu, Hua Zhang, Mingliang Jin, 2016

机译：KOH溶液中Si的一步各向异性湿法腐蚀制备的两层微结构
7. Effects of deep wet etching in HF/HNO$_3$ and KOH solutions on the laser damage resistance and surface quality of fused silica optics at 351 nm [O] . Pfiffer, Mathilde, Cormont, Philippe, Fargin, Evelyne, 2017

机译：HF / HNO $ _3 $和KOH溶液中的深湿蚀刻对351 nm熔融石英光学元件的抗激光损伤性和表面质量的影响
8. On the Activity of Platinum Catalysts in Solution. Part I. Effects of Thermal Treatment and Chemical Etching on the Pt-O/Hydrogen Specific Reaction Rate [R] . Warner, T. B., Schuldiner, S., Piersma, B. J. 1967

机译：关于铂催化剂在溶液中的活性。第一部分热处理和化学蚀刻对pt-O /氢比反应速率的影响

Microfabrication of Thermoelectric Hydrogen Sensor using KOH solution etching

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