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首页> 外文会议>Electronics Division Meeting of the Ceramic Society of Japan >Fabrication of microstrip Band Pass Filters in GHz region by aerosol deposition process
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Fabrication of microstrip Band Pass Filters in GHz region by aerosol deposition process

机译：气溶胶沉积过程GHz地区微带带通滤波器的制造

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In order to fabricate a microstrip band pass filter in GHz region as a passive component of RF modules, Al{sub}2O{sub}3 thick films were prepared on Cu metal substrates by AD (Aerosol Deposition) process. The dimensions of the filters were determined by the high frequency electromagnetic analysis. The filters were successfully fabricated on AD-derived Al{sub}2O{sub}3 thick films by employing sputtering, photolithography, electroplating and chemical etching processes. Their filtering characteristics were examined by a Network Analyzer. Through this work, we suggest that the AD process will be important the fabrication technology for integrated RF modules.
机译：为了在GHz区域中制造微带带通滤波器作为RF模块的无源分量，通过AD（气溶胶沉积）工艺在Cu金属衬底上制备Al {Sub} 2O {Sub} 3厚膜。通过高频电磁分析确定过滤器的尺寸。通过采用溅射，光刻，电镀和化学蚀刻方法，在广告衍生的Al {Sub} 2O {Sub} 3厚膜上成功制造过滤器。通过网络分析仪检查其过滤特性。通过这项工作，我们建议广告过程将重要的是集成RF模块的制造技术。

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