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首页> 外文会议>Proceedings of the 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems >A low power catalytic combustion gas sensor based on a suspended membrane microhotplate
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A low power catalytic combustion gas sensor based on a suspended membrane microhotplate

机译：基于悬浮膜微热板的低功率催化燃烧气体传感器

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摘要

A microhotplate based catalytic combustion gas sensor with low power consumption employing Pd-Pt/ γ-Al2O3 is presented in this paper. The microhotplate was fabricated on a silicon substrate by micromachining process. And the sensitive material Pd-Pt and compensation material γ-Al2O3 were prepared by sol-gel process. This sensor has been tested under constant working voltage to methane gas and achieved good performance. With the increasing of working voltage, both the output signal and power consumption of the sensor increased. The ratio of the sensitivity to power consumption was considered as an optimizing factor for selecting a rational working voltage. The sensor output signal showed a fairly linear relationship to the methane gas concentration. It achieved a sensitivity of 2mV/%CH4 to 50% LEL methane gas at a low power of 52mW.
机译：提出了一种基于微孔板的低功耗催化燃烧气体传感器，该传感器采用Pd-Pt /γ-Al 2 O 3 。通过微机械加工工艺将微热板制作在硅基板上。通过溶胶-凝胶法制备了敏感材料Pd-Pt和补偿材料γ-Al 2 O 3 。该传感器已经在恒定的甲烷气体工作电压下进行了测试，并取得了良好的性能。随着工作电压的增加，传感器的输出信号和功耗均增加。灵敏度与功耗之比被认为是选择合理工作电压的优化因素。传感器的输出信号与甲烷气体浓度呈线性关系。在52mW的低功率下，它对50％LEL甲烷气体的灵敏度为2mV /％CH 4 。

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