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首页> 外文会议>European Photovoltaic Solar Energy Conference and Exhibition >FABRICATION OF APCVD PSG EMITTER-BASED INDUSTRIAL PERC SOLAR CELLS REACHING > 21.0 CONVERSION EFFICIENCIES
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FABRICATION OF APCVD PSG EMITTER-BASED INDUSTRIAL PERC SOLAR CELLS REACHING > 21.0 CONVERSION EFFICIENCIES

机译：APCVD PSG基于PSG发射器的工业PERC太阳能电池的制备> 21.0％转化效率

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摘要

Atmospheric pressure chemical vapour deposition (APCVD) of phosphosilicate glass (PSG) layer allows a separation of glass deposition and phosphorous diffusion step. This permits the application of the selective laser-doping process either before or after the thermal diffusion, which increases the freedom of tailoring the doping profiles of both lowly and highly doped regions of selective emitter structures. We fabricate industrial p-type PERC solar cells featuring APCVD PSG-based selective emitters and study the effect of laser-doping process on current-voltage characteristics. Mean conversion efficiency η_(mean) = 21.1% and an absolute gain Δη_(mean) = 0.2% to the homogeneous emitters is achieved for solar cells after applying the laser-doping process either before or after the thermal drive-in. The most promising selective emitter group is the one featuring the laser process before the thermal diffusion step, where a carrier concentration profile with depth d = 0.9 pm as well as a low specific contact resistivity (ρ_(cmean) = 3 mΩ cm~2) are achieved. The major electrical loss of this group is related to the spectral response, where a higher front-reflection and an increased recombination at the illuminated fraction of the highly doped region need to be minimized in order to further push the efficiency level to η > 21.5%.
机译：磷酸盐玻璃（PSG）层的大气压化学气相沉积（APCVD）允许分离玻璃沉积和磷扩散步骤。这允许在热扩散之前或之后施加选择性激光掺杂过程，这增加了剪裁较低和高度掺杂区域的选择性发射器结构的掺杂曲线的自由度。我们制造工业P型PERC太阳能电池，具有基于APCVD PSG的选择性发射器，并研究激光掺杂过程对电流 - 电压特性的影响。平均转化效率η_（平均值）= 21.1％和绝对增益Δη_（平均值）在热驱动器之前或之后在施加激光掺杂过程之后对均匀发射器实现到均匀发射器的绝对增益δη_（平均值）= 0.2％。最有前途的选择性发射器组是在热扩散步骤之前具有激光过程的载波，其中载流子浓度分布，深度d = 0.9pm以及低比接触电阻率（ρ_（cmean）=3mΩcm〜2）实现。该组的主要电损失与光谱响应有关，其中需要最小化高度掺杂区域的照明部分的较高前反射和增加的重组，以便进一步推动效率水平至η> 21.5％ 。

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