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首页> 外文会议>International symposium on photoelectronic detection and imaging;ISPDI 2011 >Application of the astigmatic method to the thickness measurement of glass substrates
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Application of the astigmatic method to the thickness measurement of glass substrates

机译：散光法在玻璃基板厚度测量中的应用

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摘要

We developed a high accuracy thickness measurement system for glass substrates based on the optical design of the astigmatic method. Reflective optical measurement systems are the most widely used glass thickness measurement methods in current industrial production practice. The incline of glass in reflective optical measurement system is the main factor of inaccuracy of thickness data. Compared with reflective optical measurement system, we found our design could effectively eliminate errors of glass thickness caused by slightly shifts of glass tilt. The astigmatic optical system includes a laser diode, a cylindrical lens, and a quadrant detector. This method measures the astigmatic focusing error signal induced form the measured glass placed in the astigmatic optical system. The astigmatic focusing error signal is converted into the thickness of the glass substrate. The proposed glass thickness measurement system is verified by using a coordinate measuring machine (CMM). On the validation of our system using tri-ordinate measuring machine, the accuracy of the proposed system is 0.2 μm, with a standard deviation of 0.7μm within the thickness measuring range of 1.2mm.
机译：我们根据像散方法的光学设计开发了用于玻璃基板的高精度厚度测量系统。反射光学测量系统是当前工业生产实践中使用最广泛的玻璃厚度测量方法。反射光学测量系统中玻璃的倾斜是厚度数据不准确的主要因素。与反射光学测量系统相比，我们发现我们的设计可以有效消除由于玻璃倾斜度的微小变化而引起的玻璃厚度误差。像散光学系统包括激光二极管，柱面透镜和象限检测器。该方法测量由放置在像散光学系统中的被测玻璃引起的像散聚焦误差信号。像散聚焦误差信号被转换成玻璃基板的厚度。提议的玻璃厚度测量系统通过使用坐标测量机（CMM）进行了验证。在使用三坐标测量机对我们的系统进行验证时，提出的系统的精度为0.2μm，在1.2mm的厚度测量范围内标准偏差为0.7μm。

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