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Application of the astigmatic method to the thickness measurement of glass substrates

机译：散光法在玻璃基板厚度测量中的应用

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摘要

We developed a high accuracy thickness measurement system for glass substrates based on the optical design of the astigmatic method. The astigmatic optical system includes a laser diode, a cylindrical lens, a convex lens, and a quadrant detector. This method measures the astigmatic focusing error signal induced from the measured glass placed in the astigmatic optical system. The astigmatic focusing error signal is converted into the thickness of the glass substrate. The proposed glass thickness measurement system is verified by using a coordinate measuring machine (CMM). The accuracy of the proposed system is 0.2 (mu)m, with a standard deviation of 0.7 (mu)m within the thickness measuring range of 1.2 mm.
机译：我们根据像散方法的光学设计开发了用于玻璃基板的高精度厚度测量系统。像散光学系统包括激光二极管，圆柱透镜，凸透镜和象限检测器。该方法测量由放置在像散光学系统中的被测玻璃引起的像散聚焦误差信号。像散聚焦误差信号被转换成玻璃基板的厚度。提议的玻璃厚度测量系统通过使用坐标测量机（CMM）进行了验证。所提出的系统的精度为0.2μm，在1.2mm的厚度测量范围内的标准偏差为0.7μm。

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