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HIGH-PRECISION ABSOLUTE THICKNESS MEASUREMENTS OF OPTICALLY THICK COMPONENTS

机译:光学厚组件的高精度绝对厚度测量

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摘要

Although traditional interferometry can be ideal for displacement metrology, it is often ill-suited for dimensional metrology such as length or thickness measurement due to fringe ambiguities [1]. A number of related technologies compromise the laser's coherence, and therefore typically the measurement precision, in exchange for the ability to measure over larger windows without ambiguity. These systems rely on large information bandwidths to synthesize full, unambiguous range profiles.
机译:尽管传统的干涉测量法可能是位移测量的理想选择,但由于条纹的歧义性,它通常不适用于尺寸测量,例如长度或厚度测量[1]。许多相关技术会损害激光器的相干性,因此通常会损害测量精度,以换取在较大的窗口上进行测量而不会产生歧义的能力。这些系统依靠大的信息带宽来合成完整,明确的范围配置文件。

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