• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>IEEE International Conference on Nano/Micro Engineered and Molecular Systems >High temperature pressure sensor using a thermostable electrode
【24h】

High temperature pressure sensor using a thermostable electrode

机译：使用热稳定电极的高温压力传感器

获取原文
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

High temperature pressure sensors have been widely applied in modern industry. However, the performance of the pressure sensor is largely dependent on the thermal stability of ohmic contact electrode. This paper presents a TiSi/Ti/TiN/Pt/Au multilayer electrode. Linear transmission line method (TLM) and voltmeter-ammeter method have been used to measure the electronic properties of the electrode at high temperature. The test results show that the multilayer electrode can be used in fabricating high temperature pressure sensor. Moreover, a high temperature piezoresistive pressure sensor is designed using this multilayer electrode. ANSYS software and finite element method (FEM) have been used to analyze the stress distribution, sensitivity and nonlinearity. To verify this design, the pressure sensor is fabricated based on silicon on insulator (SOI) wafer. The pressure sensor is measured across the range of 30-150kPa and the temperature range is 25-500°C. The test results show that the ohmic contact electrode and the pressure sensor are able to work at high temperature.
机译：高温压力传感器已广泛应用于现代行业。然而，压力传感器的性能在很大程度上取决于欧姆接触电极的热稳定性。本文介绍了TISI / TI / TIN / PT / AU多层电极。线性传输线法（TLM）和电压表电流表方法已被用于测量电极在高温下的电子性质。测试结果表明，多层电极可用于制造高温压力传感器。此外，使用该多层电极设计了高温压阻压力传感器。 ANSYS软件和有限元方法（FEM）已被用于分析应力分布，灵敏度和非线性。为了验证这种设计，压力传感器基于绝缘体（SOI）晶片上的硅制品。压力传感器在30-150kPa的范围内测量，温度范围为25-500°C。测试结果表明，欧姆接触电极和压力传感器能够在高温下工作。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号