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High temperature pressure sensor using a thermostable electrode

机译：使用热稳定电极的高温压力传感器

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High temperature pressure sensors have been widely applied in modern industry. However, the performance of the pressure sensor is largely dependent on the thermal stability of ohmic contact electrode. This paper presents a TiSi/Ti/TiN/Pt/Au multilayer electrode. Linear transmission line method (TLM) and voltmeter-ammeter method have been used to measure the electronic properties of the electrode at high temperature. The test results show that the multilayer electrode can be used in fabricating high temperature pressure sensor. Moreover, a high temperature piezoresistive pressure sensor is designed using this multilayer electrode. ANSYS software and finite element method (FEM) have been used to analyze the stress distribution, sensitivity and nonlinearity. To verify this design, the pressure sensor is fabricated based on silicon on insulator (SOI) wafer. The pressure sensor is measured across the range of 30-150kPa and the temperature range is 25-500°C. The test results show that the ohmic contact electrode and the pressure sensor are able to work at high temperature.
机译：高温压力传感器已在现代工业中得到广泛应用。但是，压力传感器的性能在很大程度上取决于欧姆接触电极的热稳定性。本文介绍了TiSi / Ti / TiN / Pt / Au多层电极。线性传输线法（TLM）和电压表-电流表法已用于测量高温下电极的电子性能。测试结果表明，该多层电极可用于制造高温压力传感器。另外，使用该多层电极来设计高温压阻式压力传感器。 ANSYS软件和有限元方法（FEM）已用于分析应力分布，灵敏度和非线性。为了验证该设计，压力传感器是基于绝缘体上硅（SOI）晶圆制造的。压力传感器的测量范围为30-150kPa，温度范围为25-500°C。测试结果表明，欧姆接触电极和压力传感器能够在高温下工作。

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