The application of TCAD in industry

机译：TCAD在工业中的应用

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The key to making use of TCAD in industry is matching available capabilities to specific applications to multiply information from available experimental wafers. The art of using such partial capabilities is the focus of this paper. The following sections will describe applications of TCAD in four areas: technology selection, process optimization, process control, and design optimization.

机译：在工业中使用TCAD的关键是将可用功能与特定应用程序匹配以将信息从可用的实验晶片乘以。使用这种部分能力的艺术是本文的重点。以下部分将描述TCAD在四个方面的应用：技术选择，过程优化，过程控制和设计优化。

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《International Conference on Simulation of Semiconductor Processes and Devices》|1996年||共7页
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作者
Mar J.;
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中图分类自动化技术、计算机技术;
关键词
integrated circuit manufacture; CAD; electronics industry; semiconductor process modelling; TCAD; IC industry; technology selection; process optimization; process control; design optimization;

机译：集成电路制造;CAD;电子行业;半导体过程建模;TCAD;IC工业;技术选择;过程优化;过程控制;设计优化;

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专利

1. Applications of TCAD Simulation Software for Fabrication and study of Process Variation Effects on Threshold Voltage in 180nm Floating-Gate Device [J] . Thinh Dang Cong, Toi Le Thanh, Hao Mai Tri, Advances in Science, Technology and Engineering Systems . 2020,第1期

机译：TCAD仿真软件对180nm浮栅装置阈值电压的工艺变化效应的制造和研究
2. Combined TCAD and Geant4 simulations of diamond detectors for timing applications [J] . Morozzi A., Passeri D., Vecchi S., Nuclear Instruments & Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment . 2019,第AUGa21期

机译：钻石探测器的TCAD和Geant4组合仿真，用于计时应用
3. Combined TCAD and Geant4 simulations of diamond detectors for timing applications [J] . Morozzi A., Passeri D., Vecchi S., Nuclear Instruments & Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment . 2019,第Auga21期

机译：组合TCAD和GEANT4模拟钻石探测器，用于定时应用
4. The application of GaAs tcad industry [C] . P. A. Blakey, K. Johnson, C. Recker, Symposium on semiconductor process and device performance modelling . 1998

机译：GaAs TCAD行业的应用
5. Insight industries: Applications of industrial engineering in the software industry. [D] . Holland, Thomas Ellis, Jr. 1993

机译：有见识的行业：工业工程在软件行业中的应用。
6. Investigation of Monolithic 3D Integrated Circuit Inverter with Feedback Field Effect Transistors Using TCAD Simulation [O] . Jong Hyeok Oh, Yun Seop Yu 2020

机译：具有TCAD仿真的反馈场效应晶体管的单片3D集成电路逆变器研究
7. Applications of TCAD Simulation Software for Fabrication and study of Process Variation Effects on Threshold Voltage in 180nm Floating-Gate Device [O] . Thinh Dang Cong, Toi Le Thanh, Hao Mai Tri, 2020

机译：TCAD仿真软件对180nm浮栅装置阈值电压的工艺变化效应的制造和研究
8. Economic Concentration in Industry. A Study of the Sources and Applications of Funds for Selected Industries and Companies. [R] . Quinn, J. L. 1970

机译：工业经济集中。选定行业和公司资金来源及应用研究。

The application of TCAD in industry

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