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首页> 外文会议>IEEE International Conference on Micro Electro Mechanical Systems >Peristaltic PDMS Pump with Perfect Dynamic Valves for Both Gas and Liquid
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Peristaltic PDMS Pump with Perfect Dynamic Valves for Both Gas and Liquid

机译：蠕动PDMS泵，适用于气体和液体的完美动态阀门

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This paper presents for the first time experimental results on the peristaltic PDMS pump with perfect dynamic valves for both gas and liquid. Micropump consists of the three peristaltic-type actuators and the micro channel connecting with chambers and the inlet/outlet port. Micropump is fabricated by SU8 mold process and the two-step curing process for the irreversible bonding of PDMS layers. The diameter and the thickness of the actuator diaphragm are 1 mm and 98 μm, respectively. The total size of micro pump is about 5 mm x 5.5 mm. The dynamic gas and liquid valve actions of the single actuator are observed to verify effect of the fluidic mass and viscosity of the working fluid. Perfect peristaltic motions and robust pumping actions of the micro pump are confirmed by the flowrate test of micropump with the air and the ink.
机译：本文在蠕动PDMS泵对气体和液体具有完善的动态阀门的第一次实验结果。 MicroPump由三个蠕动型执行器和与腔室和入口/出口连接的微通道组成。 Micropump通过SU8模具工艺制造和两步固化过程，用于PDMS层的不可逆键合。致动器膜片的直径和厚度分别为1mm和98μm。微泵的总尺寸约为5mm×5.5mm。观察单个致动器的动态气体和液体阀动作以验证流体质量和工作流体的粘度的影响。通过与空气和油墨的微型泵的流量试验确认微泵的完美蠕动运动和鲁棒泵送动作。

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