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Development of an RF-CMOS Surface Acoustic wave (SAW) resonator

机译:开发RF-CMOS表面声波(SAW)谐振器

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Surface Acoustic wave resonators serve as essential components in Radio Frequency (RF) electronics and transceiver circuits. SAW resonators are traditionally discrete components, fabricated on piezoelectric substrates making it incompatible with CMOS technology processes. This work proposes modeling and simulation of SAW resonators which are integrated in RF-CMOS technology. An equivalent circuit model developed specifically for RF-CMOS resonator is presented. Three design examples of these resonators are shown to demonstrate the characteristics of the resonators at different resonant frequencies. The comparison between the simulated and fabricated resonators have been presented.
机译:表面声波谐振器用作射频(RF)电子和收发器电路中的基本组件。 SAW谐振器是传统上离散的部件,在压电基板上制造,使其与CMOS技术过程不相容。这项工作提出了在RF-CMOS技术中集成的SAW谐振器的建立和仿真。提出了专门为RF-CMOS谐振器开发的等效电路模型。示出了这些谐振器的三个设计示例,以展示不同谐振频率的谐振器的特性。已经提出了模拟和制造的谐振器之间的比较。

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