CAR blanks feasibility study results

机译：汽车空白可行性研究结果

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The rise of a high acceleration voltagte E-Beam exposure tool has created a growing need for a chemically amplified resist (CAR) system with high sensitivity, high contrast, superior resolution, superior PCD (post-coating delay) and PED (post-coating delay) stability. While mask-makers have been procuring resist coated blanks, it is generally considered that CARs must be spun on just prior to exposure due to its very short life after coating. However, it is general intention in the industry to stay in the same manner even with CARs for the next generation, which is the mission of blanks supplier also.

机译：高加速电压电压曝光工具的升高已经为具有高灵敏度，高对比度，卓越分辨率，高级PCD（涂布后延迟）和PED（涂布后）的化学放大抗蚀剂（汽车）系统而越来越需要延迟）稳定性。虽然面膜制造商一直采购抗蚀剂涂层空白，但通常认为汽车必须在曝光之前在曝光之前旋转，因为涂层后的非常短的寿命。然而，即使在下一代的汽车中，该行业的一般意图也以相同的方式保持在下一代，这也是空白供应商的使命。

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来源
《Conference on photomask and next-generation lithography mask technology》|2000年||共12页
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作者
Yasunori Yokoya; Hideo Kobayashi; Masahiro Hashimoto; Fumiko Ohta; Keishi Asakawa; SPIE-The International Society for Optical Engineering;
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正文语种
中图分类摄影机具与设备;
关键词
photomask; reticle; blanks; CAR(chemically amplified resist); PSB(post-spin baking); PCD(post-coating delay); PED(post-exposure delay); PEB (post-exposure baking);

机译：光掩模;掩模版;空白;汽车（化学放大抗蚀剂）;PSB（旋转后烘焙）;PCD（涂布后延迟）;PED（曝光后延迟）;PEB（曝光后烘焙）;

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CAR blanks feasibility study results

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