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首页> 外文会议>Conference on photomask and next-generation lithography mask technology >Design flow automation for variable shaped beam pattern generators
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Design flow automation for variable shaped beam pattern generators

机译：用于变形梁图案发电机的设计流动自动化

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Raster scan pattern generators have been used in the photomask industry for many years. Methods and software tools for data preparation for these pattern generators are well established and have been integrated into design flows with a high degree of automation. But the growing requirements for pattern fidelity have lead to the introduction of 50 kV variable shaped beam pattern generators. Due to their different writing strategy these tools use proprietary data formats and in turn require an optimized data preparation. As a result the existing design flow has to be adopted to account for these requirements. Due to the fact that cycle times have grown severely over the last years the automation of this adopted design flow will not only enhance the design flow quality by avoiding errors during manual operations but will also help to reduce turn-around times. We developed and implemented an automated design flow for a variable shaped beam pattern generator which had to fulfill two conflicting requirements: Well established automated tools originally developed for raster scan pattern generators had to be retained with only slight modifications to avoid the (re)implementation and the concurrent usage of two systems while on the other hand data generation especially during fracturing had to be optimized for a variable shaped beam pattern generator.
机译：光栅扫描模式发生器已经在光掩膜行业已经使用了很多年。方法和软件工具为这些码型发生器数据准备已经非常成熟，并已被纳入设计，自动化程度高的流动。但是，对于图案保真度不断增长的需求已经导致引入的50千伏可变形束图案生成器。由于其不同的书写策略，这些工具使用专有数据格式和反过来又需要优化的数据准备。其结果是，现有的设计流程，必须采用考虑到这些需求。由于该周期已经严重增长在过去几年中采用这一设计流程的自动化不仅会提高通过在手工操作避免错误在设计流程的质量，但也将有助于减少周转时间的事实。我们制定和实施的可变形束图形发生器，其必须满足两个相互矛盾的要求的自动化设计流程：嗯建立自动化工具最初是为光栅扫描图形发生器研制不得不稍加修改被保留，以避免（再）执行和两个系统的同时，另一方面数据生成尤其是在压裂有并发使用的用于可变形束图案生成器被优化。

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