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首页> 外文会议>European Photovoltaic Solar Energy Conference and Exhibition >PLATED NICKEL-COPPER CONTACTS ON C-SI: FROM MICROELECTRONIC PROCESSING TO COST EFFECTIVE SILICON SOLAR CELL PRODUCTION
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PLATED NICKEL-COPPER CONTACTS ON C-SI: FROM MICROELECTRONIC PROCESSING TO COST EFFECTIVE SILICON SOLAR CELL PRODUCTION

机译：在C-SI上镀镍铜触点：从微电子加工到具有成本效益的硅太阳能电池生产

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One of the key topics for industrial implementation of fully plated NiCu contacts on Si solar cells has so far been metal adhesion to silicon. The evaluation of adhesion is not entirely consistent throughout PV research, which is discussed at first. The adhesion issue of plated NiCu contacts has then been addressed by following two different routes for adhesion promotion. Firstly an "Interim Anneal" route is focussing on controlled silicide formation as a bonding agent and reliably excellent adhesion greater than wafer breakage force is shown independent of surface roughness (above 2 N/mm for measurements on clamped cells and above 4 N/mm for fortified wafers). Secondly a "Post Anneal" route is focussing on creation of high Si surface roughness by ps laser ablation of the ARC and annealing after full metallization. Excellent adhesion above wafer breakage force is demonstrated. Comparisons to different methods of ARC patterning and resulting surface roughness are made. The presented metallization technology is feasible for standard BSF cells and next generation solar cells for both p-type and n-type emitters. Solar cell efficiencies of up to 19.4%_(abs) for p-type BSF cells, 20.5%_(abs) for n-type BSF cells and 22.1 %_(abs) for n-type PassDop cells are presented.
机译：迄今为止，在硅太阳能电池上进行全电镀NiCu触点的工业实现的关键主题之一是金属对硅的粘附性。粘附力的评估在整个PV研究中并不完全一致，这在前面已经讨论过。镀镍铜触点的附着力问题已通过以下两种促进附着力的途径解决。首先，“临时退火”路线的重点是作为粘合剂的可控硅化物形成，并且可靠地显示出优于晶圆断裂力的优异附着力，而与表面粗糙度无关（对于夹紧的电池，其测量值大于2 N / mm，对于大于4 N / mm的情况）。强化威化饼）。其次，“后退火”路线的重点是通过ARC的ps激光烧蚀和完全金属化后的退火来产生高Si表面粗糙度。表现出在晶片断裂力之上的优异粘附性。比较了不同的ARC图案化方法和由此产生的表面粗糙度。提出的金属化技术对于标准BSF电池和用于p型和n型发射极的下一代太阳能电池都是可行的。对于p型BSF电池，太阳能电池效率高达19.4％_（abs），对于n型BSF电池，太阳能电池效率高达20.5％_（abs），对于n型PassDop电池，太阳能电池效率高达22.1％（abs）。

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