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A laser diffraction measuring system for submicron pixel size image sensor

机译：用于亚微米像素尺寸图像传感器的激光衍射测量系统

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This paper reports a laser diffraction measuring system based on a lab made 26M (5120×5120) pixels image sensor with a pixel pitch of 0.95μm. The long distance required in the traditional method to match the surface of the image sensor with large pixels is shortened, and the image sensor with submicron pixels becomes the key to capture the patterns at short range which is still meet the condition of fraunhofer approximation. The system refers to using a digital optoelectronic sensor array to sample the light transmitted through a specimen without the use of any imaging lenses between the object and the sensor planes. The hardware for such an imaging geometry is significantly simpler and much more compact and lightweight than that of conventional measuring system. In addition, an algorithm of image processing, termed super resolution image reconstruction, is used to further improve the resolution and is required to achieve subpixel spatial resolution in measuring system. In the experimental measurement, the final result can reach the accuracy of 0.98%.
机译：本文报道了一种基于实验室制造的26M（5120×5120）像素图像传感器且像素间距为0.95μm的激光衍射测量系统。传统方法与大像素图像传感器的表面匹配所需的长距离缩短了，而亚微米像素图像传感器成为短距离捕获图案的关键，而这仍然满足弗劳恩霍夫逼近的条件。该系统指的是使用数字光电传感器阵列对通过样本传输的光进行采样，而无需在物体和传感器平面之间使用任何成像透镜。与常规测量系统相比，用于这种成像几何的硬件明显更简单，更紧凑，更轻便。另外，称为超分辨率图像重建的图像处理算法被用于进一步提高分辨率，并且是实现测量系统中子像素空间分辨率所必需的算法。在实验测量中，最终结果可以达到0.98％的精度。

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