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首页> 外文会议>IEEE International Conference on Nano/Micro Engineered and Molecular Systems >A novel scheme design of a high-g optical NEMS accelerometer based on a single chip grating with proper sensitivity and large bandwidth
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A novel scheme design of a high-g optical NEMS accelerometer based on a single chip grating with proper sensitivity and large bandwidth

机译：基于具有适当灵敏度和大带宽的单芯片光栅的高g光学NEMS加速度计的新方案设计

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摘要

In this paper, an innovative scheme design of an optical NEMS accelerometer based on a grating with proper sensitivity and dynamic range is proposed, which can be fabricated by a single SOI chip and IC integration technique. An optical micro cavity composed of a grating and the bottom bulk silicon coated with argentum serves as a high sensitivity displacement sensor. The optical displacement detecting principle is specifically discussed in this paper. The parameter of grating, which acts as both the inertial mass and optical element, has been designed through the optimization of FDTD. In addition, a quad serpentine beam structure is introduced to this accelerometer to transfer the acceleration to the displacement of the inertial mass. The performance of the mechanical structure is optimized by the ANSYS, which can acquire high mechanical sensitivity and extremely low crosstalk between different sensitive axes.
机译：本文提出了一种具有适当灵敏度和动态范围的基于光栅的光学NEMS加速度计的创新方案设计，该方案可以通过单个SOI芯片和IC集成技术来制造。由光栅和底部覆盖有Argentum的大块硅组成的光学微腔用作高灵敏度位移传感器。本文具体讨论了光学位移检测原理。通过优化FDTD，设计了既是惯性质量又是光学元件的光栅参数。另外，四蛇形梁结构被引入到该加速度计中，以将加速度传递到惯性质量的位移上。机械结构的性能通过ANSYS进行了优化，可以实现高机械灵敏度和不同敏感轴之间的极低串扰。

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