Optical step height and trench depth measurement

机译：光学台阶高度和沟槽深度测量

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Optical profilometer measurements are contact-free and fast. The depth of single high-aspect-ratio trenches and the step height of opaque materials can be measured. Deep trenches (50-225 μm) are measured with a white light interferometer. Shallower trenches and step height profiles are measured with a chromatic white light sensor. A vertical resolution of 6 nm and a lateral resolution of 2 μm make the optical profilometer well suited for larger structures on power semiconductors that are manufactured in the back end of line.

机译：光学轮廓仪的测量是无接触且快速的。可以测量单个高纵横比沟槽的深度和不透明材料的台阶高度。用白光干涉仪测量深沟槽（50-225μm）。较浅的沟槽和台阶高度轮廓是用彩色白光传感器测量的。 6 nm的垂直分辨率和2μm的横向分辨率使光学轮廓仪非常适合在生产线后端制造的功率半导体上的较大结构。

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《Annual SEMI Advanced Semiconductor Manufacturing Conference》|2015年|84-89|共6页
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Heider Franz; Janisch Georg; Kern Michael; Weinzierl Kurt; Troger Bastian; Meyer Matthias;
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3. Depth and width measurement simulation of semiconductor trench by optical wave irradiation [J] . Shirasaki L. IEEE Transactions on Magnetics . 1997,第2期

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4. Optical step height and trench depth measurement [C] . Heider Franz, Janisch Georg, Kern Michael, Annual SEMI Advanced Semiconductor Manufacturing Conference . 2015

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5. The Central Laser Facility at the Pierre Auger Observatory: Studies of the Atmospheric Vertical Aerosol Optical Depth and other Applications to Cosmic Ray Measurements. [D] . Medina Hernandez, Carlos Francisco. 2017

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8. Measurements of Water Characteristics at Depths Greater than 10KM in the Marianas Trench. [R] . Mantyla, A. W., Reid, J. L. 1977

机译：在马里亚纳海沟中测量深度大于10Km的水特性。

Optical step height and trench depth measurement

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