Rapid non-destructive detection of sub-surface Cu in silicon-on-insulator wafers by optical second harmonic generation

机译：光学二次谐波的快速无损检测绝缘体上硅晶片中的表面铜

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Time dependent second harmonic optical signals were measured across silicon-on-insulator (SOI) wafer coupons contaminated by Cu-63 ion implanted into the buried oxide (BOX) and near the SOI/BOX and BOX/Bulk interfaces. Average signals after 1 second of exposure for all spatial points were compared between wafers and used to differentiate contamination levels post ion-implantation.

机译：在绝缘体上硅（SOI）晶片试样上测量随时间变化的二次谐波光信号，该试样被注入到埋入氧化物（BOX）中且靠近SOI / BOX和BOX / Bulk界面的Cu-63离子污染。在晶片之间比较了所有空间点在曝光1秒后的平均信号，并用于区分离子注入后的污染水平。

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《Annual SEMI Advanced Semiconductor Manufacturing Conference》|2015年|212-215|共4页
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Koldyaev V.; Kryger M.C.; Changala J.P.; Alles M.L.; Fleetwood D.M.; Schrimpf R.D.; Tolk N.;
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AM: Advanced Metrology; DI: Defect Inspection and Reduction;

机译：AM：高级计量学; DI：缺陷检查与减少;

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1. Spectroscopic second-harmonic generation from silicon-on-insulator wafers [J] . Pedersen K, Pedersen TG Journal of the Optical Society of America, B. Optical Physics . 2009,第5期

机译：绝缘体上硅晶片产生光谱二次谐波
2. Second Harmonic Generation for Noninvasive Metrology of Silicon-on-Insulator Wafers [J] . Alles M. L., Pasternak R., Lu X., IEEE Transactions on Semiconductor Manufacturing . 2007,第2期

机译：绝缘硅晶片的无创计量的第二谐波产生
3. Second harmonic generation for contactless non-destructive characterization of silicon on insulator wafers [J] . Damianos D., Pirro L., Soylu G., Solid-State Electronics . 2016,第JANaPTaB期

机译：二次谐波的产生，用于绝缘体晶片上的硅的非接触式无损表征
4. Rapid non-destructive detection of sub-surface Cu in silicon-on-insulator wafers by optical second harmonic generation [C] . Koldyaev V., Kryger M.C., Changala J.P., Annual SEMI Advanced Semiconductor Manufacturing Conference . 2015

机译：通过光学第二谐波产生快速地无损检测硅式绝缘体中的亚表面Cu
5. Nonlinear N anophotonic Systems for Harmonic Generation, Parametric Amplification, Optical Processing and Single-Molecule Detection [D] . Zhang, Yu. 2014

机译：用于谐波产生，参数放大，光学处理和单分子检测的非线性NOOPOPOPOPOOPOOPOOPOOPOOPOOPOOPOOPOOPOOPOOP系统
6. Optical second harmonic generation microscopy: application to the sensitive detection of cell membrane damage [O] . Noritaka Kato 2019

机译：光学二次谐波显微镜：应用于细胞膜损伤的灵敏检测
7. The detection of optical second harmonic generation from high TcYBa2Cu3O7 epitaxial thin films [O] . Kuang Yao Lo 2011

机译：高TcYBa2Cu3O7外延薄膜中光学二次谐波产生的检测。
8. Studies of the Ag/Cu(110) Bimetallic Interface Using Optical Second-Harmonic Generation. [R] . Muenchausen, R. E., Hoffbauer, M. A., Taylor, T. N. 1989

机译：用光学二次谐波产生ag / Cu（110）双金属界面的研究。

Rapid non-destructive detection of sub-surface Cu in silicon-on-insulator wafers by optical second harmonic generation

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