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Analysis of the influence of the workpiece self-weight in precision optics manufacturing using FEM simulation

机译：用FEM模拟分析精密光学制造中的工件自重的影响

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In this publication the effects, the extent and the importance of the deformation of a workpiece, in particular of lenses, caused by its own weight, before and during the manufacturing process in precision optics are examined. Since the deformations move in the single-digit to two-digit nanometer range, the investigation is carried out in a first step with FEM calculations. This has the advantage that current situations can be quickly interpreted and improved, without having to carry out time-consuming and cost-intensive experiments from the outset. A major part of the work is therefore the investigation of current workpiece holder and clamping situations in optics manufacturing. The present work concentrates exclusively on the theoretical calculation of the deformations occurring in various clamping situations, which are traced back to reality. Ansys Workbench is used as a tool for the calculations. The test series under laboratory conditions for the validation of the theoretical results will be part of further work.
机译：在该出版物中，研究了由其自身重量，在精密光学系统中的制造过程之前和期间的工件，特别是透镜的变形的影响，范围和重要性。由于变形在单位数到两位数纳米纳米范围内，因此在第一步中进行了对有限元计算的研究。这具有以下优点，即当前情况可以快速解释和改进，而不必从一开始就耗费耗时和成本密集的实验。因此，这项工作的主要部分是对光学制造中的当前工件架和夹紧情况的调查。本作工作专门集中在各种夹紧情况下发生的变形的理论计算，它们被追溯到现实。 ANSYS Workbench用作计算的工具。测试系列在实验室条件下，验证理论结果将成为进一步工作的一部分。

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