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Analysis of the influence of the workpiece self-weight in precision optics manufacturing using FEM simulation

机译：有限元模拟分析精密光学制造中工件自重的影响

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In this publication the effects, the extent and the importance of the deformation of a workpiece, in particular of lenses, caused by its own weight, before and during the manufacturing process in precision optics are examined. Since the deformations move in the single-digit to two-digit nanometer range, the investigation is carried out in a first step with FEM calculations. This has the advantage that current situations can be quickly interpreted and improved, without having to carry out time-consuming and cost-intensive experiments from the outset. A major part of the work is therefore the investigation of current workpiece holder and clamping situations in optics manufacturing. The present work concentrates exclusively on the theoretical calculation of the deformations occurring in various clamping situations, which are traced back to reality. Ansys Workbench is used as a tool for the calculations. The test series under laboratory conditions for the validation of the theoretical results will be part of further work.
机译：在该出版物中，研究了在精密光学器件的制造过程之前和期间，由工件自身的重量引起的工件，特别是透镜变形的影响，程度和重要性。由于变形范围在一位数到两位数的纳米范围内，因此第一步是使用FEM计算进行研究。这样做的优点是可以快速解释和改善当前情况，而不必从一开始就进行耗时且成本高昂的实验。因此，工作的主要部分是调查光学制造中当前的工件夹持器和夹持情况。目前的工作仅集中在各种夹紧情况下发生的变形的理论计算上，这些变形可以追溯到现实中。 Ansys Workbench用作计算工具。在实验室条件下验证理论结果的测试系列将是进一步工作的一部分。

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