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The Application of Pentaprism Scanning Technology on the Manufacturing of M3MP

机译:五棱镜扫描技术在M3MP制造中的应用

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The PSS (pentaprism scanning system) has advantages of simple structure, needless of reference flat, be able of on-site testing, etc, it plays an important role in large flat reflective mirror's manufacturing, especially the high accuracy testing of low order aberrations. The PSS system measures directly the slope information of the tested flat surface. Aimed at the unique requirement of M3MP, which is the prototype mirror of the tertiary mirror in TMT (Thirty Meter Telescope) project, this paper analyzed the slope distribution of low order aberrations, power and astigmatism, which is very important in the manufacturing process of M3MP. Then the sample route lines of PSS are reorganized and new data process algorism is implemented. All these work is done to improve PSS's measure sensitivity of power and astigmatism, for guiding the manufacturing process of M3MP.
机译:PSS(五棱镜扫描系统)具有结构简单,无需参考平面,可以进行现场测试等优点,在大型平面反射镜的制造中,尤其是低阶像差的高精度测试中起着重要的作用。 PSS系统直接测量被测平面的坡度信息。针对TMT(Thirty Meter Telescope)项目三级镜的原型镜M3MP的独特要求,本文分析了低阶像差,光焦度和像散的斜率分布,这在M3MP的制造过程中非常重要。 M3MP。然后对PSS的样本路由线进行重组,并实施新的数据处理算法。所有这些工作都是为了提高PSS对功率和像散的测量灵敏度,以指导M3MP的制造过程。

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