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Advanced method for the characterization of polishing suspensions

机译：表征抛光悬浮液的先进方法

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The industrial production of components for applications in the area of precision optics has a long-standing tradition in Germany. As in almost all branches of industry, the external circumstances, processes and products have changed over time. Large lots are becoming less frequent and the demand for special components is growing. In order to meet these requirements, it is necessary to adapt the production processes quickly and flexibly. In the field of chemo-mechanical polishing (CMP), this means that in addition to the process parameters such as speed, pressure and feed, the task-specific adaptation of suspension and polishing pad's gain in importance. Along with these changes, it is becoming increasingly important to compare and evaluate the properties of the various polishing suspensions. The procedures according to DIN 58750-3 and DIN 58750-4 are suitable for this purpose. Due to the clearly defined procedures and the constant boundary conditions, different suspensions can be compared and evaluated. The study presented here shows that this method can also lead to misinterpretations. Known relationships, such as the influence of the polishing pad, the concentration of the suspension and the influence of the processed materials play an important role. An extension of the procedure of DIN 58750-3 for the test of a polishing agent can help in a task-specific characterization of polishing slurries.
机译：用于精密光学领域的组件的工业生产在德国有着悠久的传统。与几乎所有行业分支一样，外部环境，过程和产品也随着时间而改变。大量采购变得越来越少，对特殊组件的需求也在增长。为了满足这些要求，有必要快速灵活地调整生产过程。在化学机械抛光（CMP）领域中，这意味着除了工艺参数（例如速度，压力和进料）之外，悬架和抛光垫的特定任务适应性也很重要。随着这些变化，比较和评估各种抛光悬浮液的性能变得越来越重要。根据DIN 58750-3和DIN 58750-4的程序适用于此目的。由于明确定义的程序和恒定的边界条件，可以比较和评估不同的悬架。此处进行的研究表明，这种方法也可能导致误解。已知的关系，例如抛光垫的影响，悬浮液的浓度和加工材料的影响，起着重要的作用。 DIN 58750-3的抛光剂测试程序的扩展可以帮助特定任务表征抛光浆。

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