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首页> 外文会议>Conference on Ph.D. Research in Microelectronics and Electronics >3D printed capacitive pressure sensor with corrugated surface
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3D printed capacitive pressure sensor with corrugated surface

机译：具有波纹表面的3D打印电容式压力传感器

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In this work a novel 3D printed capacitive pressure sensor with a corrugated surface is presented. The design composed of top and bottom plates. The sensor is 3D printed using a commercially available polymer material and then coated with Cr and Au with sputtering process. The dimensions of produced structure that designed is 11 × 11 × 4.6mm. Due to the corrugated surface, the area of the plates is increased 19.46% compared to a standard flat surface parallel plate capacitive sensor in the same bulk area. The design process of the sensor, simulation and the experimental results are given and explained in detail. The performance of the sensor is tested with various pressure levels between 0 Pa and 8.88 kPa. The experimental results show that the capacitance range of the sensor is 2.7 pF-4.3 pF. The maximum sensitivity of the sensor is obtained as 0.14 pF / kPa. The results confirm that the presented capacitive sensor can be utilized for carrying out pressure measurements.
机译：在这项工作中，提出了一种具有波纹表面的新型3D打印电容式压力传感器。该设计由顶板和底板组成。使用可商购的聚合物材料对传感器进行3D打印，然后通过溅射工艺对Cr和Au进行涂覆。设计的生产结构尺寸为11×11×4.6mm。由于具有波纹表面，与相同体积的标准平面平行板电容式传感器相比，板的面积增加了19.46％。给出并详细说明了传感器的设计过程，仿真和实验结果。传感器的性能在0 Pa和8.88 kPa之间的各种压力水平下进行了测试。实验结果表明，传感器的电容范围为2.7 pF-4.3 pF。传感器的最大灵敏度为0.14 pF / kPa。结果证实了所提出的电容传感器可以用于进行压力测量。

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