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Characterization of electrical crosstalk in 4T-APS arrays using TCAD simulations

机译:使用TCAD仿真表征4T-APS阵列中的电串扰

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TCAD simulations have been conducted on a CMOS image sensor in order to characterize the electrical component of the crosstalk between pixels through the study of the electric field distribution. The image sensor consists on a linear array of five pinned photodiodes (PPD) with their transmission gates, floating diffusion and reset transistors. The effect of the variations of the thickness of the epitaxial layer has been addressed as well. In fact, the depth of the boundary of the epitaxial layer affects quantum efficiency (QE) so a correlation with crosstalk has been identified.
机译:为了通过研究电场分布来表征像素之间串扰的电气成分,已经在CMOS图像传感器上进行了TCAD仿真。图像传感器由五个固定光电二极管(PPD)的线性阵列组成,这些二极管具有其传输门,浮动扩散和复位晶体管。还已经解决了外延层厚度变化的影响。实际上,外延层边界的深度会影响量子效率(QE),因此已经确定了与串扰的相关性。

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