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Characterization of diamond turned sinusoidal grid surfaces based on 2D-DFT

机译：基于2D-DFT的金刚石车削正弦网格表面的表征

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Precision diamond turning based on a fast tool servo (FTS) as a micro-displacement module is a very popular micro-structured surface manufacturing technology. The surface accuracy is a sticking factor that demands the need for a long-standing solution to fabricate ultra-precise freeform surfaces accurately and efficiently. This paper presents a surface characterization method for sinusoidal grid surfaces fabricated by FTS. The method includes data acquisition, data processing and pattern analysis. A series of cutting and measurement experiments have been conducted on sinusoidal grid surfaces using a two-axis ultra-precision machining system equipped with Fast Tool Servo and examined by a non-contact micro-surface profile system. The microscope images are analyzed by the two-dimensional discrete Fourier transform technique, which perfectly matches the nature of sinusoidal waves. A comparison studies on surface quality of machined surface based on constant-angle and constant arc-length methods have also been conducted.
机译：基于快速工具伺服（FTS）作为微位移模块的精密金刚石车削是一种非常流行的微结构表面制造技术。表面精度是一个重要因素，需要长期解决方案来准确，高效地制造超精密自由曲面。本文提出了一种由FTS制作的正弦网格表面的表面表征方法。该方法包括数据采集，数据处理和模式分析。已使用配备有Fast Tool Servo的两轴超精密加工系统在正弦网格表面上进行了一系列切割和测量实验，并通过非接触式微表面轮廓系统进行了检查。用二维离散傅里叶变换技术分析显微镜图像，该技术与正弦波的性质完全匹配。还基于恒定角度和恒定弧长方法对加工表面的表面质量进行了比较研究。

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