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3D Shape from SEM Image Using Improved Fast Marching Method

机译:使用改进的快速行进方法从SEM图像获得3D形状

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This paper proposes an improved fast marching method to recover 3D shape from a Scanning Electron Microscope (SEM) image as a Shape from Shading approach. First, the method uses the second-order finite difference and the information of diagonal grid points to obtain highly accurate solution. Then the method speeds up with increasing the number of the neighboring points, and changes the update mode to avoid sorting processing. Finally, the results were compared between proposed method and previous method via simulation and real SEM image. Experimental results show the proposed method gives the better and faster 3D shape.
机译:本文提出了一种改进的快速行进方法,该方法可以从扫描电子显微镜(SEM)图像中将3D形状恢复为“阴影产生的形状”。首先,该方法利用二阶有限差分和对角网格点的信息来获得高度精确的解。然后,该方法随着增加相邻点的数量而加快速度,并更改更新模式以避免排序处理。最后,通过仿真和真实的SEM图像比较了所提出的方法和先前方法的结果。实验结果表明,该方法能够提供更好,更快的3D形状。

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